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http://dx.doi.org/10.5228/KSPP.2004.13.3.273

Development of Tracking System for Micro Mechanical Part Using Image Processing Technique and 2-Axis Stage  

표창률 (인덕대학 컴퓨터응용기계계열)
강성훈 (인덕대학 산업기술연구)
전병희 (인덕대학 컴퓨터응용기계계열)
Publication Information
Transactions of Materials Processing / v.13, no.3, 2004 , pp. 273-278 More about this Journal
Abstract
This paper subscribes the measurement system that can position the target to measure by moving 2-axis stage, which is controlled by the data from image processing technique. The high resolution camera and lens are used in measurement of micro mechanical part, but the region of measurement is very small. It is necessary the re-positioning to measure several regions in one part. The system described in this paper has the accuracy with about $0.9\mu\textrm{m}$ resolution per one pixel and can be applied to measure micro mechanical part.
Keywords
Image Processing Technique; 2-Axis Stage; Tracking; Position Control; FOV(Field Of View); ROI(Region Of Interest);
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Times Cited By KSCI : 2  (Citation Analysis)
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