Modeling of Passive Heating for Replicating Sub-micron Patterns in Optical Disk Substrates
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배재철
(연세대학교 대학원 기계공학과)
김영민 (연세대학교 대학원 기계공학과) 김홍민 (연세대학교 대학원 기계공학과) 강신일 (연세대학교 기계공학부) |
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