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http://dx.doi.org/10.5228/KSPP.2003.12.4.382

Finite Element Analysis of Nanoindentation Process and its Experimental Verification  

이정우 (부산대학교 대학원 정밀기계공학과)
윤성원 (부산대학교 대학원 정밀기계공학과)
강충길 (부산대학교 기계공학부 정밀정형 및 금형가공 연구소)
Publication Information
Transactions of Materials Processing / v.12, no.4, 2003 , pp. 382-387 More about this Journal
Abstract
In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behaviors of the materials during indentation were studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-10nm. Comparisons between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test.
Keywords
Nanoindentation; Hyper-Fine Pattern; Pile-Up; Elastic Recovery; Berkovich Indenter;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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