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http://dx.doi.org/10.5228/KSPP.2002.11.7.569

Fabrication and Characterizations of Thick PZT Films for Micro Piezoelectric Devices  

박준식 (전자부품연구원, 나노메카트로닉스 연구센터)
박광범 (전자부품연구원, 나노메카트로닉스 연구센터)
윤대원 (전자부품연구원, 나노메카트로닉스 연구센터)
박효덕 (전자부품연구원, 나노메카트로닉스 연구센터)
강성군 (한양대학교, 재료공학과)
최태훈 (한국생산기술연구원, 마이크로 성형팀)
이낙규 (한국생산기술연구원, 마이크로 성형팀)
나경환 (한국생산기술연구원, 마이크로 성형팀)
Publication Information
Transactions of Materials Processing / v.11, no.7, 2002 , pp. 569-574 More about this Journal
Abstract
Recently, thick PZT films are required for the cases of micro piezoelectric devices with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Microstructures, and electrical properties of films were investigated by XRD, FESEM, impedance analyzer, and P-E hysteresis. PZT films with 2.7$mu extrm{m}$ to 4.4${\mu}{\textrm}{m}$ thickness were fabricated. Dielectric constant, loss, remnant polarization and coercive field of them were 880~1650 at 1kHz, 2~3% at 1kHz, 26~32 $\mu$C/$ extrm{cm}^2$, and 33~60kV/cm, respectively. Also a transverse piezoelectric coefficient $(e_{31,f})$ measurement system was fabricated and tested for thick film samples.
Keywords
Thick PTT Film; Micro Piezoelectric Device; Transverse Piezoelectric Coefficient; Sol-Gel;
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