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http://dx.doi.org/10.4191/kcers.2018.55.2.08

Epitaxial Growth of Three-Dimensional ZnO and GaN Light Emitting Crystals  

Yang, Dong Won (Division of Materials Science and Engineering, Hanyang University)
Park, Won Il (Division of Materials Science and Engineering, Hanyang University)
Publication Information
Journal of the Korean Ceramic Society / v.55, no.2, 2018 , pp. 108-115 More about this Journal
Abstract
The increasing demands for three-dimensional (3D) electronic and optoelectronic devices have triggered interest in epitaxial growth of 3D semiconductor materials. However, most of the epitaxially-grown nano- and micro-structures available so far are limited to certain forms of crystal arrays, and the level of control is still very low. In this review, we describe our latest progress in 3D epitaxy of oxide and nitride semiconductor crystals. This paper covers issues ranging from (i) low-temperature solution-phase synthesis of a well-regulated array of ZnO single crystals to (ii) systematic control of the axial and lateral growth rate correlated to the diameter and interspacing of nanocrystals, as well as the concentration of additional ion additives. In addition, the critical aspects in the heteroepitaxial growth of GaN and InGaN multilayers on these ZnO nanocrystal templates are discussed to address its application to a 3D light emitting diode array.
Keywords
ZnO; Structural applications; Microstructure; Optical properties;
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1 J. Y. Huang, X. D. Wang, and Z. L. Wang, "Controlled Replication of Butterfly Wings for Achieving Tunable Photonic Properties," Nano Lett., 6 [10] 2325-31 (2006).   DOI
2 T. S. Kustandi, H. Y. Low, J. H. Teng, I. Rodriguez, and R. Yin, "Mimicking Domino-Like Photonic Nanostructures on Butterfly Wings," Small, 5 [5] 574-78 (2009).   DOI
3 R. K. Cheedarala, J. H. Jeon, C. D. Kee, and I. K. Oh. "Bio-Inspired All-Organic Soft Actuator Based on a ${\pi}-{\pi}$ Stacked 3D Ionic Network Membrane and Ultra-Fast Solution Processing," Adv. Funct. Mater., 24 [38] 6005-15 (2014).   DOI
4 M. L. Gou, X. Qu, W. Zhu, M. L. Xiang, J. Yang, K. Zhang, Y. Q. Wei, and S. C. Chen, "Bio-Inspired Detoxification Using 3D-Printed Hydrogel Nanocomposites," Nat. Commun., 5 3774 (2014).   DOI
5 J. H. Huang, J. Kim, N. Agrawal, A. P. Sudarson, J. E. Maxim, A. Jayaraman, and V. M. Ugaz, "Rapid Fabrication of Bio-inspired 3D Microfluidic Vascular Networks," Adv. Mater., 21 [35] 3567-71 (2009).   DOI
6 H. Y. Li, Y. J. Hwang, B. A. E. Courtright, F. N. Eberle, S. Subramaniyan, and S. A. Jenekhe, "Fine-Tuning the 3D Structure of Nonfullerene Electron Acceptors toward High-Performance Polymer Solar Cells," Adv. Mater., 27 [21] 3266-72 (2015).   DOI
7 J. Lott, C. Ryan, B. Valle, J. R. Johnson, D. A. Schiraldi, J. Shan, K. D. Singer, and C. Weder, "Two-Photon 3D Optical Data Storage via Aggregate Switching of Excimer-Forming Dyes," Adv. Mater., 23 [21] 2425-29 (2011).   DOI
8 D. Andeen, J. H. Kim, F. F. Lange, G. K. L. Goh, and S. Tripathy, "Lateral Epitaxial Overgrowth of ZnO in Water at 90 Degrees C," Adv. Funct. Mater., 16 [6] 799-804 (2006).   DOI
9 Y. Tchoe, J. Jo, M. Kim, J. Heo, G. Yoo, C. Sone, and G. C. Yi, "Variable-Color Light-Emitting Diodes Using GaN Microdonut Arrays," Adv. Mater., 26 [19] 3019-23 (2014).   DOI
10 Y. Tchoe, C. H. Lee, J. B. Park, H. Baek, K. Chung, J. Jo, M. Kim, and G. C. Yi, "Microtube Light-Emitting Diode Arrays with Metal Cores," ACS Nano, 10 [3] 3114-20 (2016).   DOI
11 W. W. Lee, J. Yi, S. B. Kim, Y. H. Kim, H. G. Park, and W. I. Park, "Morphology-Controlled Three-Dimensional Nanoarchitectures Produced by Exploiting Vertical and In-Plane Crystallographic Orientations in Hydrothermal ZnO Crystals," Cryst. Growth Des., 11 [11] 4927-32 (2011).   DOI
12 X. L. Cao, H. B. Zeng, M. Wang, X. J. Xu, M. Fang, S. L. Ji, and L. D. Zhang, "Large Scale Fabrication of Quasi-Aligned ZnO Stacking Nanoplates," J. Phys. Chem. C, 112 [14] 5267-70 (2008).   DOI
13 J. H. Joo, K. J. Greenberg, M. Baram, D. R. Clarke, and E. L. Hu, "Aqueous Epitaxial Growth of ZnO on Single Crystalline Au Microplates," Cryst. Growth Des., 13 [3] 986-91 (2013).   DOI
14 W. W. Lee, S. B. Kim, J. Yi, W. T. Nichols, and W. I. Park, "Surface Polarity-Dependent Cathodoluminescence in Hydrothermally Grown ZnO Hexagonal Rods," J. Phys. Chem. C, 116 [1] 456-60 (2012).   DOI
15 Z. R. R. Tian, J. A. Voigt, J. Liu, B. McKenzie, M. J. McDermott, M. A. Rodriguez, H. Konishi, and H. F. Xu, "Complex and Oriented ZnO Nanostructures," Nat. Mater., 2 [12] 821-26 (2003).   DOI
16 J. M. Lee, Y. S. No, S. Kim, H. G. Park, and W. I. Park, "Strong Interactive Growth Behaviours in Solution-Phase Synthesis of Three-Dimensional Metal Oxide Nanostructures," Nat. Commun., 6 6325 (2015).   DOI
17 W. W. Lee, S. Chang, D. W. Yang, J. M. Lee, H. G. Park, and W. I. Park, "Three-Dimensional Epitaxy of Single Crystalline Semiconductors by Polarity-Selective Multi-stage Growth," CrystEngComm, 18 [42] 8262-69 (2016).   DOI
18 J. Yi, Y. C. Wang, Y. W. Jiang, I. W. Jung, W. J. Liu, V. De Andrade, R. Q. Xu, R. Parameswaran, I. R. Peters, R. Divan, X. H. Xiao, T. Sun, Y. Lee, W. I. Park, and B. Tian, "3D Calcite Heterostructures for Dynamic and Deform- able Mineralized Matrices," Nat. Commun., 8 [1] 509 (2017).   DOI
19 S. Wooh, H. Yoon, J. H. Jung, Y. G. Lee, J. H. Koh, B. Lee, Y. S. Kang, and K. Char, "Efficient Light Harvesting with Micropatterned 3D Pyramidal Photoanodes in Dye-Sensitized Solar Cells," Adv. Mater., 25 [22] 3111-16 (2013).   DOI
20 Z. Yan, F. Zhang, F. Liu, M. D. Han, D. P. Ou, Y. H. Liu, Q. Lin, X. L. Guo, H. R. Fu, Z. Q. Xie, M. Y. Gao, Y. M. Huang, J. Kim, Y. T. Qiu, K. W. Nan, J. Kim, P. Gutruf, H. Y. Luo, A. Zhao, K. C. Hwang, Y. G. Huang, Y. H. Zhang, and J. A. Rogers, "Mechanical Assembly of Complex, 3D Mesostructures from Releasable Multilayers of Advanced Materials," Sci. Adv., 2 [9] 1601014 (2016).   DOI
21 M. Deubel, G. Von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct Laser Writing of Three-Dimensional Photonic-Crystal Templates for Telecommunications," Nat. Mater., 3 [7] 444-47 (2004).   DOI
22 T. A. Schaedler, A. J. Jacobsen, A. Torrents, A. E. Sorensen, J. Lian, J. R. Greer, L. Valdevit, and W. B. Carter, "Ultralight Metallic Microlattices," Science, 334 [6058] 962-65 (2011).   DOI
23 S. Shoji and S. Kawata, "Photofabrication of Three-Dimensional Photonic Crystals by Multibeam Laser Interference into a Photopolymerizable Resin," Appl. Phys. Lett., 76 [19] 2668-70 (2000).   DOI
24 D. Therriault, R. F. Shepherd, S. R. White, and J. A. Lewis, "Fugitive Inks for Direct-Write Assembly of Three-Dimensional Microvascular Networks," Adv. Mater., 17 [4] 395-99 (2005).   DOI
25 T. Song, J. W. Choung, J. G. Park, W. Il Park, J. A. Rogers, and U. Paik, "Surface Polarity and Shape-Controlled Synthesis of ZnO Nanostructures on GaN Thin Films Based on Catalyst-Free Metalorganic Vapor Phase Epitaxy," Adv. Mater., 20 [23] 4464-69 (2008).   DOI
26 D. W. Yang, D. Yoo, W. W. Lee, J. M. Lee, G. C. Yi, and W. I. Park, "Three-Dimensionally-Architectured GaN Light Emitting Crystals," CrystEngComm, 19 [15] 2007-12 (2017).   DOI
27 N. Kroger, S. Lorenz, E. Brunner, and M. Sumper, "Self-assembly of Highly Phosphorylated Silaffins and Their Function in Biosilica Morphogenesis," Science, 298 [5593] 584-86 (2002).   DOI
28 S. V. Patwardhan, N. Mukherjee, M. Steinitz-Kannan, and S. J. Clarson, "Bioinspired Synthesis of New Silica Structures," Chem. Commun., 9 [10] 1122-23 (2003).
29 E. Pouget, E. Dujardin, A. Cavalier, A. Moreac, C. Valery, V. Marchi-Artzner, T. Weiss, A. Renault, M. Paternostre, and F. Artzner, "Hierarchical Architectures by Synergy between Dynamical Template Self-Assembly and Biomineralization," Nat. Mater., 6 [6] 434-39 (2007).   DOI
30 M. Sumper, S. Lorenz, and E. Brunner, "Biomimetic Control of Size in the Polyamine-Directed Formation of Silica Nanospheres," Angew. Chem., Int. Ed., 42 [42] 5192-95 (2003).   DOI
31 J. M. Lee, Y. B. Pyun, J. Yi, J. W. Choung, and W. I. Park, "ZnO Nanorod-Graphene Hybrid Architectures for Multifunctional Conductors," J. Phys. Chem. C, 113 [44] 19134-38 (2009).   DOI
32 N. Pan, X. P. Wang, M. Li, F. Q. Li, and J. G. Hou, "Strong Surface Effect on Cathodoluminescence of an Individual Tapered ZnO Nanorod," J. Phys. Chem. C, 111 [46] 17265-67 (2007).   DOI
33 I. Shalish, H. Temkin, and V. Narayanamurti, "Size-Dependent Surface Luminescence in ZnO Nanowires," Phys. Rev. B, 69 [24] 245401 (2004).   DOI
34 E. M. Wong, J. E. Bonevich, and P. C. Searson, "Growth Kinetics of Nanocrystalline ZnO Particles from Colloidal Suspensions," J. Phys. Chem. B, 102 [40] 7770-75 (1998).   DOI
35 S. Das, K. Dutta, and A. Pramanik, "Morphology Control of ZnO with Citrate: a Time and Concentration Dependent Mechanistic Insight," CrystEngComm, 15 [32] 6349-58 (2013).   DOI
36 J. H. Kim, D. Andeen, and F. F. Lange, "Hydrothermal Growth of Periodic, Single-Crystal ZnO Microrods and Microtunnels," Adv. Mater., 18 [18] 2453-57 (2006).   DOI
37 S. B. Kim, S. Kim, S. S. Kwon, W. W. Lee, J. S. Kim, and W. I. Park, "Large-Scale Synthesis of Vertically Aligned ZnO Hexagonal Nanotube-Rod Hybrids Using a Two-Step Growth Method," J. Am. Ceram. Soc., 96 [11] 3500-3 (2013).   DOI
38 N. Kroger and N. Poulsen, "Diatoms-From Cell Wall Biogenesis to Nanotechnology," Annu. Rev. Genet., 42 83-107 (2008).   DOI
39 R. Boruah, P. Nath, D. Mohanta, G. A. Ahmed, and A. Choudhury, "Photonic Properties of Butterfly Wing Infiltrated with Ag-Nanoparticles," Nanosci. Nanotech. Lett., 3 [4] 458-62 (2011).   DOI
40 A. J. Wang, S. L. Chen, P. Dong, C. T. Hu, and L. Sang, "Fabrication of Large-Area and High-Quality Colloidal Crystal Films on Nanocrystalline Porous Substrates by a Room Temperature Floating Self-Assembly Method," Thin Solid Films, 519 [6] 1798-802 (2011).   DOI
41 S. B. Kim, W. W. Lee, J. Yi, W. I. Park, J. S. Kim, and W. T. Nichols, "Simple, Large-Scale Patterning of Hydrophobic ZnO Nanorod Arrays," ACS Appl. Mater. Interfaces, 4 [8] 3910-15 (2012).   DOI
42 Y. H. Ko, M. S. Kim, W. Park, and J. S. Yu, "Well-Integrated ZnO Nanorod Arrays on Conductive Textiles by Electrochemical Synthesis and Their Physical Properties," Nanoscale Res. Lett., 8 [1] 28 (2013).   DOI
43 Y. H. Ko, S. Kim, W. Park, and J. S. Yu, "Facile Fabrication of Forest-like ZnO Hierarchical Structures on Conductive Fabric Substrate," Phys. Status Solidi RRL, 6 [8] 355-57 (2012).   DOI
44 K. T. Park, F. Xia, S. W. Kim, S. B. Kim, T. Song, U. Paik, and W. I. Park, "Facile Synthesis of Ultrathin ZnO Nanotubes with Well-Organized Hexagonal Nanowalls and Sealed Layouts: Applications for Lithium Ion Battery Anodes," J. Phys. Chem. C, 117 [2] 1037-43 (2013).   DOI
45 J. Yi, J. Y. Kim, H. G. Jin, S. Song, C. Choi, W. T. Nichols, and W. I. Park, "Site-Specific Synthesis of ZnO Nanocrystalline Networks via a Hydrothermal Method," Met. Mater. Int., 18 [5] 845-49 (2012).   DOI
46 K. Chung, C. H. Lee, and G. C. Yi, "Transferable GaN Layers Grown on ZnO-Coated Graphene Layers for Optoelectronic Devices," Science, 330 [6004] 655-57 (2010).   DOI
47 J. H. Kim, E. M. Kim, D. Andeen, D. Thomson, S. P. Den-Baars, and F. F. Lange, "Growth of Heteroepitaxial ZnO Thin Films on GaN-Buffered $Al_2O_3$(0001) Substrates by Low-Temperature Hydrothermal Synthesis at 90 Degrees C," Adv. Funct. Mater., 17 [3] 463-71 (2007).   DOI