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http://dx.doi.org/10.4191/kcers.2014.51.5.447

Effects of Duty Cycle and Pulse Frequency on the Microstructure and Mechanical Properties of TiAlN Coatings  

Chun, Sung-Yong (Department of Advanced Materials Science and Engineering, Mokpo National University)
Hwang, Ju Yeon (Department of Advanced Materials Science and Engineering, Mokpo National University)
Publication Information
Journal of the Korean Ceramic Society / v.51, no.5, 2014 , pp. 447-452 More about this Journal
Abstract
This paper presents the effects of pulse plasma parameters such as duty cycle and pulse frequency on the properties of TiAlN coatings deposited by asymmetric bipolar pulsed DC magnetron sputtering systems. The results show that, with decreasing duty cycle and increasing pulse frequency, the coating morphology changes from a columnar structure to a dense structure with finer grains. Pulsed sputtered TiAlN coatings showed higher hardness, higher residual stress, and smaller grain sizes than did DC prepared TiAlN coatings. Moreover, residual stress and nanoindentation hardness of pulsed sputtered TiAlN coatings increased with increasing pulse frequency. Meanwhile, the surface roughness decreased continuously with increasing pulsed DC frequency up to 50 kHz.
Keywords
Asymmetric bipolar; Duty cycle; Pulse frequency; Nanoindentation; Surface morphology;
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Times Cited By KSCI : 12  (Citation Analysis)
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