Browse > Article
http://dx.doi.org/10.4191/kcers.2013.50.5.348

Plasma Resistance Evaluation and Characteristics of Yttria Ceramics Sintered by Using Calcination Yttria  

Choi, Jinsam (Department of Ceramic Engineering, Gyeongsang National University)
Nakayama, Tadachika (Department of Electrical Engineering/Electronic Devices and Optical Electronics group, Nagaoka University of Technology)
Bae, Won Tae (Department of Ceramic Engineering, Gyeongsang National University)
Publication Information
Journal of the Korean Ceramic Society / v.50, no.5, 2013 , pp. 348-352 More about this Journal
Abstract
The evaluation of plasma resistance and the characteristics of yttria ceramics fabricated by calcination yttria as a starting material without dopants under an oxidation atmosphere was investigated. Regardless of the starting materials, as-received, and calcined yttria powder, XRD patterns showed that all samples have $Y_2O_3$ phase. The three cycling process inhibited a large grain, which occurs frequently during the yttria sintering, and a high density ceramic with a homogeneous grain size was obtained. The grain size of the sintered ceramic was affected by the starting powders. The smaller the grain size, the larger were the Young's modulus and KIC. Compared to $Al_2O_3$ and $ZrO_2$ ceramics, yttria ceramics showed a 3 times larger plasma resistance and a 1.4~2.2 times lower weight loss during the plasma etching test, respectively.
Keywords
As-received Yttria; Calcined Yttria; Homogeneous Grain; Plasma Resistance;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 W. Kingery, H. Bowen, and D. Uhlmann, "Introduction to Ceramics," 2nd ed., 418, 431 and 505, John Wiley & Sons Inc., New York, U.S.A. (1976).
2 R. W. Rice, C. W. Carl, and F. Borchelt, "Hardness-Grain-Size Relations in Ceramics," J. Am. Ceram. Soc., 77 [110] 2539-53 (1994).   DOI   ScienceOn
3 R. W. Armstrong, E. L. Raymond, and R. R. Vandervoort, "Anomalous Increases in Hardness with Increase in Grain Size of Beryllia," J. Am. Ceram. Soc., 53, 529-30 (1970).   DOI
4 P. J. Jorgensen and R. C. Anderson, "Grain-Boundary Segregation and Final Stage Sintering of $Y_2O_3$," J. Am. Ceram. Soc., 50 [11] 553-58 (1967).   DOI
5 Y. Huang, D. Jiang, J. Zhang, and Q. Lin, "Fabrication of Transparent Lanthanum-Doped Yttria Ceramics by Combination of Two-Step Sintering and Vacuum Sintering," J. Am. Ceram. Soc., 92 [12] 2883-87 (2009).   DOI   ScienceOn
6 C. Greskovich and K. N. Woods, "Fabrication of Transparent $ThO_2$-Doped $Y_2O_3$," J. Am. Ceram. Soc. Bull., 52 [5] 473-78 (1973).
7 K. Katayama, H. Osawa, T. Akiba, and H. Yanagida, "Sintering and Electrical Properties of CaO-Doped $Y_2O_3$," J. Eur. Ceram. Soc., 6, 39-45 (1990).   DOI   ScienceOn
8 J. S. Choi, D. W. Shin, and W. T. Bae, "Characteristics of Thermal Oxidation on Hot- Pressed Pure Yttria Ceramics(in Korean)," J. Kor. Ceram. Soc., 50 [3] 180-85 (2013).   과학기술학회마을   DOI   ScienceOn
9 F. Jollet, C. Noguera, M. Gautier, N. Thromat, and J. P. Duraud, "Influence of Oxygen Vacancies on the Electronic Structure of Yttrium Oxide," J. Am. Ceram. Soc., 74 [2] 358-64 (1991).   DOI
10 W. H. Rhodes, E. Q, Trickett, and D. J. Sordelet, "Key Powder Characteristics in Sintered Optical Ceramics," Ceram. Trans., 12, 677-90 (1990).
11 O. N. Carlsson, "The O-Y (Oxygen-Yttrium) System," Bull. Alloy Phase Diagrams, 11 [1] 61-66 (1990).   DOI
12 T. Nobby and P. Kofstad, "Electrical Conductivity and Defect Structure of $Y_2O_3$ as a Function of Water Vapor Pressure," J. Am. Ceram. Soc., 67 [12] 786-92 (1984).   DOI   ScienceOn
13 V. Swamy, N. A. Dubrovinskaya, and L. S. Dubrovinsky, "High-Temperature Powder X-ray Diffraction of Yttria to Melting Point," J. Mater. Res., 14 [2] 456-59 (1999).   DOI   ScienceOn
14 T. Ikegami, J. G. Li, and T. Mori, "Fabrication of Transparent Yttria Ceramics by Low Temperature Sysnthesis of Yttrium Hydroxide," J. Am. Ceram. Soc., 85 [7] 1725-29 (2002).
15 L. M. Lapato, A. V. Shevchenko, and A. E. Kushchevskii, "Polymorphic Transitions of Rare Earth Oxides at High Temperatures," Inorg. Mater., 10 [8] 1276-81 (1974).
16 N. Saito, S. I. Matsusa, and T. Ikegami, "Fabrication of Transparent Yttria Ceramics at Low Temperature Using Carbonate-Derived Powder," J. Am. Ceram. Soc., 81 [8] 2023-28 (1998).
17 J. Iwasawa, R. Nishimizu, M. Tokita, M. Kiyohara, and K. Uematsu, "Plasma Resistance Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process," J. Am. Ceram. Soc., 90 [8] 2327-32 (2007).   DOI   ScienceOn
18 A. Muta and Y. Tsukuda, "Method for Sintering Very Pure Yttria Compacts to Transparency," U.S. Pat. 3,764,643 (Oct. 9, 1973).
19 I. W. Chen and X. H. Wang, "Sintering Dense Nanocrystalline Ceramics without Final-stage Grain Growth," Nature, 404, 168-71 (2000).   DOI   ScienceOn
20 P. L. Chen and I. W. Chen, "Grain Boundary Mobility in $Y_2O_3$ : Defect Mechanism and Dopant Effects," J. Am. Ceram. Soc., 79 [7] 1801-09 (1996).   DOI   ScienceOn