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http://dx.doi.org/10.4191/KCERS.2009.46.6.583

Effect of By-product (NH4Cl) on the Improvement of the Red Color Tone of Tantalum Nitride (Ta3N5)  

Park, Eun-Young (Ceramicware Technology Center, Korea Institute of Ceramic Engineering and Technology)
Pee, Jae-Hwan (Ceramicware Technology Center, Korea Institute of Ceramic Engineering and Technology)
Kim, Yoo-Jin (Ceramicware Technology Center, Korea Institute of Ceramic Engineering and Technology)
Cho, Woo-Seok (Ceramicware Technology Center, Korea Institute of Ceramic Engineering and Technology)
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Abstract
The Tantalum nitride has attracted wide at attention as issues related to the toxicity of Cd-related materials. But in the titration process of Ta$Cl_5$ solution with $NH_4$OH, $NH_4$Cl, as a by product, was remained in the prepared Tantalum precursor. The tantalum precursor with $NH_4$Cl was nitrided by ammonolysis. The red color tone of $Ta_3N_5$ was reduced by the residual $NH_4$Cl reduce. Therefore, amorphous Tantalum precursor was prepared by filtering process with as hydrous ethanol to remove the $NH_4$Cl. In the case of using Tantalum precursor without $NH_4$Cl, we successfully synthesized the Tantalum nitride with good red color. The value of red color tone was improved from $a^*$=36.8 to $a^*$=53.0. The synthesized powder was characterized by XRD, SEM, the Nitrogen / Oxygen Determinator, TG-DTA, and the CIE $L^*a^*b^*$ colorimeter.
Keywords
$Ta_3N_5$; Red color tone; $NH_4Cl$; Tantalum precursor; Tantalum chloride;
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