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http://dx.doi.org/10.4191/KCERS.2009.46.5.456

Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis  

Kim, Kyeong-Beom (Korea Institute of Ceramic Engineering and Technology(Icheon))
Kim, Dae-Min (Korea Institute of Ceramic Engineering and Technology(Icheon))
Lee, Jung-Ki (School of Materials Engineering, Inha University)
Oh, Yoon-Suk (Korea Institute of Ceramic Engineering and Technology(Icheon))
Kim, Hyung-Tae (Korea Institute of Ceramic Engineering and Technology(Icheon))
Kim, Hyung-Sun (School of Materials Engineering, Inha University)
Lee, Sung-Min (Korea Institute of Ceramic Engineering and Technology(Icheon))
Publication Information
Journal of the Korean Ceramic Society / v.46, no.5, 2009 , pp. 456-461 More about this Journal
Abstract
Chemical composition and status of chemical bonding of the YAG($Y_3Al_5O_{12}$) ceramics after the exposure to fluorine plasma have been investigated using X-ray photoelectron spectroscopy, with the analysis on its erosion behavior. On the surface, F showed the maximum content, decreasing with depth, meanwhile the cation composition remained almost constant, irrespective of the position. The peaks due to Y in the reaction layer consisted of two kinds, showing the Y-O and Y-F bonds. These surface modifications under fluorine plasma seem to promote the erosion of the YAG ceramics. Excess addition of $Al_2O_3$ or $Y_2O_3$ into stoichiometric YAG produced 2nd phases of $Al_2O_3$ and $YAlO_3$, respectively, resulting in the slight difference in the local erosion rates. But, the overall average erosion rate was not sensitive to such excess additions of $Al_2O_3$ or $Y_2O_3$.
Keywords
YAG($Y_3Al_5O_{12}$); Plasma resistance; Erosion; X-ray photoelectron spectroscopy;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
Times Cited By SCOPUS : 6
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