Interaction of DEMS with H-terminated Si (001) Surface: A First Principles Study
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Kim, Dae-Hyun
(Department of Materials Engineering, Korea University of Technology and Education)
Kim, Dae-Hee (Department of Materials Engineering, Korea University of Technology and Education) Park, So-Yeon (ATTO Co. LTD.) Seo, Hwa-Il (School of Information Technology, Korea University of Technology and Education) Lee, Do-Hyoung (ATTO Co. LTD.) Kim, Yeong-Cheol (Department of Materials Engineering, Korea University of Technology and Education) |
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