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http://dx.doi.org/10.4191/KCERS.2009.46.1.010

Refractive Index Dispersion of Sputter-Deposited Silicon-Rich Silica Thin Films  

Jin, Byeong-Kyou (Department of Materials Science and Engineering, Korea Aerospace University)
Choi, Yong-Gyu (Department of Materials Science and Engineering, Korea Aerospace University)
Publication Information
Journal of the Korean Ceramic Society / v.46, no.1, 2009 , pp. 10-15 More about this Journal
Abstract
We have fabricated silicon-rich silica thin films via RF magnetron sputtering using a SiO target. Thickness evolution and microstructure change of such $SiO_x$ (1 thin films turned out to be mainly responsible for the increase of refractive index.
Keywords
Silicon-rich silica; Thin film; Refractive index; Sputtering;
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