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http://dx.doi.org/10.4191/KCERS.2008.45.1.739

Fabrication of Ceramic-based Passive Mixers for Microfluidic Application by Thick Film Lithography  

Choi, Jae-Kyung (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology)
Yoon, Young-Joon (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology)
Lim, Jong-Woo (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology)
Kim, Hyo-Tae (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology)
Koo, Eun-Hae (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology)
Choi, Youn-Suk (Kyungwon Tech Inc.)
Lee, Jong-Heun (Department of Materials Science & Engineering, Korea University)
Kim, Jong-Hee (Division of Fusion & Convergence Technology, Korea Institute of Ceramic Engineering & Technology)
Publication Information
Journal of the Korean Ceramic Society / v.45, no.11, 2008 , pp. 739-743 More about this Journal
Abstract
Microfluidic device can be applied in a wide range of chemical and biological technology. In this paper, ceramic-based T-type passive mixers for microfluidic applications were fabricated by LTCC process combined with thick film photolithography. The base ceramic material in thick film was amorphous cordierite $((Mg,Ca)_2Al_4Si_5O_{18})$ and photoimageable polymers were added to give a photosensitivity. Two types of passive mixer, which showed the channel width of 1.0 mm and $200{\mu}m$, respectively, were designed considering mixing efficiency in the channel and their microfluidic properties were discussed in detail.
Keywords
Ceramic passive mixer; Cordierite; Photoimageable paste; Photolithography; Microfluidics;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
Times Cited By SCOPUS : 0
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