Fabrication of TFA-MOD YBCO Films Using Y2Ba1Cu1Ox Process

YBCO film was synthesized by using a new approach to the TFA-MOD method. In the fabrication process, $Y_2Ba_1Cu_1O_x\;and\;Ba_3Cu_5O_8$ powders were used as precursors (the so called '211 process'), instead of Y-, Ba-, and Cu-based acetates, and dissolved in trifluoroacetic acid followed by calcining and firing heat treatment. Consequently, we successfully fabricated YBCO film and evaluated the phase formation, texture evolution, and critical properties as a function of the calcining and firing temperature and humidity, in order to explore its possible application in coated conductor fabrication. The films were calcined at $430-460^{\circ}C$ and then fired at $750-800^{\circ}C\;in\;a\;0-20\%$ humidified $Ar-O_2$ atmosphere. We observed that $BaF_2$ phase was effectively reduced and that a sharp and strong biaxial texture formed under humidified atmosphere leading to increased critical properties. In addition, we found that the microstructure varied significantly with the firing temperature: the grain grew further, the film became denser, and the degree of texture and phase purity varied as the firing temperature increased. For the film fired at $775^{\circ}C$ after calcining at $460^{\circ}C$, the critical current was obtained to be 39 A/cm-width (corresponding critical current density is $2.0\;MA/cm^2$ which was probably attributed to such factors as the enhanced phase purity and out-of-plane texture, the moderate film density and grain size, and crack-free surface.

Y2Ba1Cu1Ox공정을 이용한 TFA-MOC YBCO 박막 공정 개발