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http://dx.doi.org/10.4191/KCERS.2006.43.2.079

Microstructure and Magnetic Properties of Pulsed DC Magnetron Sputtered Zn0.8Co0.2O Film Deposited at Various Substrate Temperatures  

Kang, Young-Hun (Advanced Material Process of Information Technology, Sungkyunkwan University)
Kim, Bong-Seok (Advanced Material Process of Information Technology, Sungkyunkwan University)
Tai, Weon-Pil (Fine Chemical Industry Support Center, Ulsan Industry Promotion Techno Park)
Kim, Ki-Chul (Electronics and Telecommunications Research Institute)
Suh, Su-Jeung (Advanced Material Process of Information Technology, Sungkyunkwan University)
Park, Tae-Seok (Advanced Material Process of Information Technology, Sungkyunkwan University)
Kim, Young-Sung (Advanced Material Process of Information Technology, Sungkyunkwan University)
Publication Information
Abstract
We studied the microstructure and magnetic property of the pulsed DC magnetron sputtered $Zn_{\0.8}Co_{0.2}O$ film as a function of substrate temperatures. The X-ray patterns of the $Zn_{\0.8}Co_{0.2}O$ film showed a strong (002) preferential orientation at $500^{\circ}C$. The films with a crystallite size of 23-35 nm were grown in the form of nano-sized structure and this tendency was remarkable with increasing substrate temperature. The UV-visible result showed that the $Zn_{\0.8}Co_{0.2}O$ film prepared above $300^{\circ}C$ has a high optical transmittance of over $80\%$ in the visible region. The absorption bands were observed due to sp-d interchange action by $Co^{2+}$ complex ion and dd transition in the region from 500 to 700nm. The resistivity of the film was below $10^{-1}\;\Omega-cm\;above\;300^{\circ}C$. The AGM analysis results for the all films showed the magnetic hysteresis curves of ferromagnetic nature. The low electrical resistivity and room temperature ferromagnetism of ZnCoO thin films 'deposited above $300^{\circ}C$ suggested the possibility for the application to Diluted Magnetic Semiconductors (DMSs).
Keywords
ZnCoO thin films; Pulsed DC magnetron sputtering; Ferromagnetism; Diluted Magnetic Semiconductors (DMSs);
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