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http://dx.doi.org/10.4191/KCERS.2003.40.8.765

Si(100) Surface Structure Studied by Time-Of-Flight Impact-Collision ton Scattering Spectroscopy  

Hwang, Yeon (Department of Materials Science and Engineering, Seoul National University of Technology)
Lee, Tae-Kun (Department of Materials Science and Engineering, Seoul National University of Technology)
Publication Information
Journal of the Korean Ceramic Society / v.40, no.8, 2003 , pp. 765-769 More about this Journal
Abstract
Time-Of-flight Impact-Collision Ion Scattering Spectroscopy (TOF-ICISS) using 2 keV He$\^$+/ ion was applied to study the geometrical structure of the Si(100) surface. The scattered ion intensity was measured along the [011] azimuth varying the incident angle. The focusing effects were appeared at the incident angles of 20$^{\circ}$, 28$^{\circ}$, 46$^{\circ}$, 63$^{\circ}$, and 80$^{\circ}$. The Si atomic position was simulated by calculating the shadow cone to explain the five focusing effects. The four focusing effects at 28$^{\circ}$, 46$^{\circ}$, 63$^{\circ}$, and 80$^{\circ}$ resulted from the {011} surface where no dimers existed on the outermost surface. On the contrary, the scattering between two Si atoms in a dimer resulted in the focusing peak at 20$^{\circ}$.
Keywords
Atomic structure; Si(100) surface; Impact-collision ion scattering spectroscopy; Time-of-fight;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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