Browse > Article
http://dx.doi.org/10.4191/KCERS.2003.40.6.589

Refractive Index Control by Dopant for Thick Silica films Deposited by FHD  

김용탁 (성균관대학교 신소재공학과)
서용곤 (전자부품연구원 광부품연구센터)
윤형도 (전자부품연구원 광부품연구센터)
임영민 (전자부품연구원 광부품연구센터)
윤대호 (성균관대학교 신소재공학과)
Publication Information
Journal of the Korean Ceramic Society / v.40, no.6, 2003 , pp. 589-593 More about this Journal
Abstract
Silica based Planar Lightwave Circuits (PLC) have been applied to various kinds of wave-guided optical passive devices. SiO$_2$ (buffer) and GeO$_2$-SiO$_2$ (core) thick films have been deposited by Flame Hydrolysis Deposition (FHD). The SiO$_2$ films were produced by the flame hydrolysis reaction of halide materials such as SiCl$_4$, POCl$_3$ and BCl$_3$ into an oxy-hydrogen torch. The P concentration increased from 2.0 to 2.8 at％ on increasing the POCl$_3$/BCl$_3$ flow ratio. The refractive index increased from 1.4584 to 1.4605 on increasing the POC1$_3$/BC1$_3$ flow ratio from 0.6 to 2.6. The refractive index of GeO$_2$-SiO$_2$ films was controlled by the GeCl$_4$ flow rate. The refractive index increased from 1.4615 to 1.4809 on increasing the GeCl$_4$ flow rate from 30 to 120 sccm.
Keywords
Flame hydrolysis deposition; Consolidation; Silica; PLC;
Citations & Related Records
Times Cited By KSCI : 5  (Citation Analysis)
연도 인용수 순위
1 Optical Doping of Soda-Line-Silicaic Glass with Erbium by Ion Implantation /
[ E.Snoeks;G. N.van den Hoven;A.Poleman ] / J. Appl. Phys.   DOI   ScienceOn
2 Optical Properties and Structural Analysis of SiO₂Thick Films Deposited by Plasma Enhanced Chemical Vapor Deposition /
[ S.M.Cho;Y.T.;Y.G.Seo;H.D.Yoon;Y.M.Im;D.H.Yoon ] / J. Kor. Ceram. Soc.   과학기술학회마을   DOI   ScienceOn
3 Low-loss Integrated Optical Waveguides Fabricated by Nitrogen Ion Implantation /
[ I.K.Naik ] / Appl. Phys. Lett.   DOI
4 248nm Photosensitivity of Reduces SiO₂-GeO₂ Layer in Silica Substrate : Preliminary Results on the Light-matter Interaction /
[ B.Poumellec;F.Kherbouche;C.Haut ] / Appl. Surf. Sci.   DOI   ScienceOn
5 The Guided Field Distribution Characteristics in the Ion-Exchage Channel Glass Waveguide /
[ J.I.Park;T.S.Park;S.P.Chun;H.B.Chung ] / J. of the Kor. Ins. of Elec. and Elec. Mater. Eng.   과학기술학회마을
6 Calculation of Optical Field Distributions of Polymeric Waveguides Based on Replication Technology /
[ N.Y.Kim;J.H.Kim ] / J. of Elec. and Elec. Mater.
7 Glass Waveguides on Silicon for Hybrid Optical Packaging /
[ C.H.Henry;G.E.Blonder;R.F.Kazarinov ] / J. Lightware Tech.   DOI   ScienceOn
8 Highdensity Integrated Planar Lightwave Circuits Using SiO₂-GeO₂ Waveguides with a High Refractive Index Difference /
[ S.Suzuki;M.Yanagisawa;Y.Hibino;K.Oda ] / J. Lightware Tech.   DOI   ScienceOn
9 Refractive Index Control of Silicon Oxynitride Thick Films on Core Layer of Silica Optical Waveguide /
[ Y.T.Kim;S.M.Cho;S.G.Yoon;Y.G.Seo;Y.M.Im;D.H.Yoon ] / J. Kor. Ceram. Soc.   과학기술학회마을   DOI   ScienceOn
10 Porous Silica Ceramics Prepared by Sol-gel Process-effect of H₂O/TEOS Molar Ratio /
[ J.H.Lee;W.J.Kim;J.Lee ] / J. Kor. Ceram. Soc.   과학기술학회마을
11 Silica Waveguides on Silicon and their Application to Integrated-optic Components /
[ M.Kawachi ] / Optical and Quantum Electronics   DOI
12 X-Ray Photoelectron Spectroscopy Study of Optical Waveguide Glasses /
[ M.H.Kibel;P.W.Leech ] / Surface and Interface Analysis   DOI   ScienceOn
13 Plasmaenhanced Chemical Vapor Deposition of Low-loss SiON Optical Waveguides at 1.5m Wavelength /
[ F.Bruno;M.D.Guidice;R.Recca;F.Tesra ] / Appl. Opt.   DOI