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http://dx.doi.org/10.4191/KCERS.2002.39.8.742

Microstructure and Ferroelectric Properties of PZT Thin Films Deposited on various Interlayers by R.F. Magnetron Sputtering  

Park, Chul-Ho (Department of Inorganic Materials and Engineering, Pusan National University)
Choi, Duck-Young (Department of Inorganic Materials and Engineering, Pusan National University)
Son, Young-Guk (Department of Inorganic Materials and Engineering, Pusan National University)
Publication Information
Journal of the Korean Ceramic Society / v.39, no.8, 2002 , pp. 742-749 More about this Journal
Abstract
The PZT thin films werre deposited on Pt/Ti/$SiO_2$/Si substrate by R. F. magnetron sputtering with $Pb_{1.1}Zr_{0.53}Ti_{0.47}O_3$ target. When interlayers(PbO, $TiO_2$, PbO/$TiO_2$) were inserted between PZT and Pt, the crystallization of the PZT thin films was considerably improved and the processing temperature was lowered. Compared to the pure PZT thin films, dielectric constant, dielectric loss and polarization properties of PZT thin films with interlayers were considerably improved. From XPS depth profile analysis, it was confirmed that PZT thin films and interlayers existed independently. In particular, PZT thin films deposited on interlayer(PbO/$TiO_2$) showed the best dielectric property (${\varepsilon}_r$=414.94, tan${\delta}$=0.0241, Pr=22${\mu}C/cm^2$).
Keywords
$(Pb_{1.1}Zr_{0.53}Ti_{0.47}O_3)$ PZT; Thin film; Ferroelectric properties; Interlayer;
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Times Cited By KSCI : 1  (Citation Analysis)
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1 M. E. Lines and A. M. Glass, 'Principles and Applications of Ferroelectrics and Related Materials,' Clarendon Press, Oxford (1977)
2 J. F. Scott and C. A. P. Araujo, 'Ferroelectric Memories,' Science, 246 1400-05 (1989)   DOI   ScienceOn
3 K. Sreenivas, Msayer, C. K. Jen and K. Yamanaka, 'Bulk and Surface Acoustic Wave Transconduction in Sputtered Lead Zirconate Titanate Thin Films,' IEEE Ultrasonic Symposium, 291-95 (1988)
4 H. D. Chen, K. R. Udayakumar, C. J. Gaskey and L. E. Cross, 'Electrical Properties Maxima in Thin Films of the Lead Zirconate-lead Titanate Solid Solution System,' Appl. Phys. Lett., 67 3411 (1995)   DOI
5 W. Liu, J. S. Ko and W. Zhu, 'Preparadon and Properties of Multilayer Pb(Zr,Ti)$O_3$/PbTi$O_3$ Thin Films for Pyroelectric Application,' Thin Solid Films, 371 254-58 (2000)   DOI   ScienceOn
6 J. S. Lee, C. S. Kim and S. K. Joo, 'A Study on the Saturation of Grain Size in Pb(Zr,Ti)$O_3$ Thin Films,' J. Kor. Ceram. Soc., 37 [6] 530-36 (2000)
7 Y. G. Son, 'Electrical Properties of $Ba_{0.5}Sr_{0.5}TiO_3$ Thin Film with Various Heat Treatment Conditions,' J. Kor. Ceram. Soc., 38 [5] 492-98 (2001)
8 W. Wang, Z. Chen, M. Adachi and A. Kawabata. Integrat, 'Preparation of Zr-rich PZT and La-doped PbTi$O_3$ Thin Films by RF Magnetron Sputtering and their Properties for Pyroelectric Applicational Vapor Deposidon(MOCVD),' Ferroelectr, 12 251-55 (1996)   DOI
9 D. K. Yim, S. Y. Choi, H. J. Jung and Y. J. Oh, 'Microstructure and Ferroelectric Properdes of Sol-gel Derived PbTi$O_3$ Interlayered PZT Thin Films,' J. Kor. Ceram. Soc., 32 [12] 1408-16 (1995)
10 Y. S. Hwang, S. H. Paek, Y. H. Ha, J. S. Choi, H. C. Cho and J. P. Mah, 'Fundamental Study on PZT Thin Film Capacitor(I) -A Study on the Reaction of Substrate and PZT Thin Film by RF Magnetron Sputtering,' Kor. J. Mater. Res., 3 [1] 19-27 (1993)
11 T. H. Kim, J. M. Koo, H. S. Min, I. S. Lee and J. Y. Kim, 'Effects of PZT-electrode Interface Layers on Capacitor Properties,' Kor. J. Mater. Res., 10 [10] 684-90 (2000)
12 S. T. Kim, 'Effect of Activation of Oxygen by Electron Cycolotron Resonance Plasma on the Incorporation of Pb in the Deposition of Pb(Zr,Ti)$O_3$ Films by DC Magnetron Reactive Sputtering,' Jpn. J. Appl. Phys., 36 5663-69 (1997)   DOI
13 S. O. Chung, 'Formation of a Lead Zirconate Titanate (PZT) /Pt Interfacial Layer and Structural Changes in the Pt/Ti/Si$O_2$/Si Substrate during the Deposition of PZT Thin Film by Electron Cyclotron Resonance Plasma-enhanced Chemical Vapor Deposition,' Jpn. J. Appl. Phys., 36 4386-91 (1997)   DOI
14 J. H. Jang and K. H. Yoon, 'Electric Fatigue Properties of Sol-gel-derived Pb(Zr,Ti)$O_3$/PbZi$O_3$ Multilayered Thin Films,' Appl. Phys. Lett., 75 130-32 (1999)   DOI
15 J. S. Lee, C. S. Kim and S. K. Joo, 'A Study on the Saturation of Grain in Pb(Zr,Ti)$O_3$ Thin Films,' J. Kor. Ceram. Soc., 37 [6] 530-36 (2000)
16 B. D. Cullity, 'Elements of X-ray Diffraction,' 2nd Ed., 360-68, Addison-Wesley (1978)
17 K. Ishikawa, K. Sakura, D. Fu, S. Yamada, H. Suzuki and T. Hayashi, 'Effect of PbTi$O_3$ Seeding Layer on the Growth of Sol-gel-drived Pb($Zr_{0.53}Ti_{0.47}$)$O_3$ Thin Film,' Jpn. J. Appl. Phys., 37 5128-31 (1998)   DOI
18 M. V. Raymond, J. Chen and D. M. Smith, 'The Effect of Microstructure on the Pyroelectric Properdes of PZT/PbTi$O_3$ Ceramics,' Integrated Ferroetectrics, 83 [12] 7789-92 (1994)
19 K. H. Yoon, J. H. Shin, J. H. Park and D. H. Kang, 'Stackin Effects on Dielectric Properties of Sol-gel Derived Pb($Zr_{0.53}Ti_{0.47}$)$O_3$/PbTi$O_3$ Thin Films,' J. Appl. Phys., 83 3626-29 (1998)   DOI   ScienceOn