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http://dx.doi.org/10.4191/KCERS.2002.39.3.233

Reflection Properties of SiO2/ITO Transparent and Conductive Thin Films for Display  

Shin, Yong-Wook (Nano Materials Research Center, KIST)
Kim, Sang-Woo (Nano Materials Research Center, KIST)
Yoon, Ki-Hyun (Department of Ceramic Engineering, Yonsei University)
Publication Information
Journal of the Korean Ceramic Society / v.39, no.3, 2002 , pp. 233-239 More about this Journal
Abstract
Reflection properties of $SiO_2$/ITO (Indium Tin Oxide) thin films coated for electromagnetic shielding, anti-static and anti-reflection on the front surface in CRT were studied. The behavior of reflectance as a function of thickness of $SiO_2$/ITO was investigated and applied to theoretical anti0reflection model of double layers and three layers. As the thickness of ITO layer increased, the deviation from theoretical value increased because uniformity of film deteriorated by pore. Because of the effect of mixed layer of $SiO_2$ and ITO, experimental reflectance showed better acceptance to the three layer antireflection model of $SiO_2$/$SiO_2$+ITO/ITO than the two layer model. Based on the theoretical antireflection design, the double layer whose thickness of $SiO_2$ and ITO were 90, 65 nm, respectively appear 2.5% in reflectance at standard wavelength, 550 nm. This phenomenon was similar to theoretical reflectance in visual range.
Keywords
CRT; SiO$_2$/ITO; Reflectance; Antireflection;
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Times Cited By KSCI : 1  (Citation Analysis)
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