Browse > Article

박막 PZT를 이용한 마이크로 액추에이터 제작 및 성능평가  

Seo, Yeong-Ho (한국기계연구원 나노공정장비연구센터)
Choe, Du-Seon (한국기계연구원 나노공정장비연구센터)
Hwang, Gyeong-Hyeon (한국기계연구원 나노공정장비연구센터)
Publication Information
Journal of KSNVE / v.15, no.4, 2005 , pp. 19-24 More about this Journal
Keywords
Citations & Related Records
연도 인용수 순위
  • Reference
1 Tang, W.C.-K.., 1990, 'Electrostatic Comb Drive for Resonant Sensors and Actuator Applications,' Doctoral Dissertation, University of California at Berkeley
2 Sugawara, Y., Onitsuka, K., Yoshikawa, S., Xu Q. C., Newnham, R. E. and Uchino, K., 1992, Metal-Ceiamic Composite Actuators, J. Am. Ceram. Soc., Vol.75, No. 4,pp.996-998
3 Schiele, I. and Hillerich, B., 1999, Comparison of Lateral and Vertical Switches for Application as Microrelays, J. Micromech. Microeng., pp. 146-150
4 Toshiyoshi, H. and Fujita, H., 1995, 'A Piezoelectri-cally Operated Optical Chopper by Quartz Micro-machining,' Journal of Microelectromecbni- cal Systems, Vol.4,No.1,pp.3-9   ScienceOn
5 Conway, N.J. and Kim, S.-G. 2004, 'Large-strain, Piezoelectric, In-Plane Micro-Actuator,' IEEE MEMS Conference, Netherlands, pp.454-457
6 Legtenberg, R., et. al., 1995, 'Electrostatic Curved Electrode Actuators,' Proc. IEEE MEMS Conference, Netherlands,pp.37-42
7 Haertling, G. H., 1994, Rainbow Ceramics: A New Type of Ullia-high-displacement Actuator, Am. Ceram Soc Bull, Vol.73, No. 1, pp.93-96
8 Rebeiz, G.M. and MuIdavin, J.B., 2001, RF MEMS Switches and Switch Circuits, IEEE Microwave Magazine, Dec., pp.59-71
9 Tilmans, H. A., 2002, MEMS components for wiwless communications, EUROSENSORS XVI, Sep