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http://dx.doi.org/10.11627/jkise.2012.35.4.1

Differential Burn-in and Reliability Screening Policy Using Yield Information Based on Spatial Stochastic Processes  

Hwang, Jung Yoon (Device Solution Division, Samsung Electronics Co., Ltd.)
Shim, Younghak (Device Solution Division, Samsung Electronics Co., Ltd.)
Publication Information
Journal of Korean Society of Industrial and Systems Engineering / v.35, no.4, 2012 , pp. 1-9 More about this Journal
Abstract
Decisions on reliability screening rules and burn-in policies are determined based on the estimated reliability. The variability in a semiconductor manufacturing process does not only causes quality problems but it also makes reliability estimation more complicated. This study investigates the nonuniformity characteristics of integrated circuit reliability according to defect density distribution within a wafer and between wafers then develops optimal burn-in policy based on the estimated reliability. New reliability estimation model based on yield information is developed using a spatial stochastic process. Spatial defect density variation is reflected in the reliability estimation, and the defect densities of each die location are considered as input variables of the burn-in optimization. Reliability screening and optimal burn-in policy subject to the burn-in cost minimization is examined, and numerical experiments are conducted.
Keywords
Spatial Stochastic Process; Differential Burn-in; Yield;
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