1 |
Adachi T, Kawasaki M, Nakabayashi H: The Behavior of Dust Particle in Electrostatic Precipitation, 1979.
|
2 |
M. Goldman, A. Goldman and R. S. Sigmond, "The corona discharge, its properties and specific uses", Pure & Appi. Chem., vol. 57, no. 9, pp. 1353-1362, 1985. DOI: https://doi.org/10.1351/pac198557091353
DOI
|
3 |
Arnold Steinman, "The Physics of Charge Neutralization by Air Ions", Compliance Engineering 23, no. 1, 2006.
|
4 |
Ohmi T, Inaba H and Takenami T : Research on adhesion of particles to charged wafers critical in contamination control, 1989.
|
5 |
Inaba H, Ohmi T, Takenami T, et al., "Evaluation of Wind Velocity, Airstream Distribution, and Dust Scattering," in Proceedings of 8th Symposium on ULSI Ultra Clean Technology: Submicron ULSI Process Technology II, Tokyo, pp. 245-290, 1989.
|
6 |
Ohmi T, "Ultraclean Technology: ULSI Proceeding's Crucial Factor," Microcontamination, pp. 49-58, 1988.
|
7 |
Nojima H, Nishikawa K: Air Purification Technology Using Ions Generated by Discharge Plasma at Atmospheric Pressure, 2002.
|
8 |
Larry Levit and Douglas Beyer, "Generating Air Ionization With No Contaminating Particles", www.electrostatics.org/images/2011_A3.pdf
|
9 |
Simco Ion Application Note, Principles of Sheath Technology and Low Maintenance Ionizer, http://www.novxcorp.com/documents/technical/TS-005nozzles.pdf
|
10 |
Okano Kazuo, Posadas Arnel, "Particle Generation of Ceramic Emitters for Cleanroom Air Ionizers", EOS/ESD Symposium, pp. 287-291, 1997.
|
11 |
Sakata S, Okada T : Contamination-Free Ionizer for Super Clean Rooms, 1991.
|
12 |
Noll Charles G., Lawless Philip A., "Comparison of Germanium and Silicon Needles as Emitter Electrodes for Air Ionizers", EOS/ESD Symposium, pp. 195-204, 1997.
|