A study of fabrication micro bump for TSP testing using maskless lithography system.
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Kim, Ki-Beom
(Department of Mechanical Engineering, Inha University)
Han, Bong-Seok (Department of Mechanical Engineering, Inha University) Yang, Ji-Kyung (Department of Mechanical Engineering, Inha University) Han, Yu-Jin (Department of Mechanical Engineering, Inha University) Kang, Dong-Seong (Department of Mechanical Engineering, Inha University) Lee, In-Cheol (Department of Mechanical Engineering, Inha University) |
1 | Y. K. Cho, T. H. Han, S. J. Ha, J. W. Lee, J. S. Kim, S. M. Kim, M. W. Cho, "Fabrication of Passive Micromixer using a Digital Micromirror Device-based Maskless Lithography System", International Journal Of Precision Engineering And Manufacturing, Vol. 15, No. 7, pp. 1417-1422, July, 2014. DOI: https://doi.org/10.1007/s12541-014-0485-8 DOI |
2 | S. W. Yoon, K. T. Kang, W. K. Choi, H. T. Lee, "3D TSV Micro Cu Column Chip-to-Substrate/Chip Assembly/Packaging Technology", International Wafer Level Packaging Conference, Nov. 2012. |
3 | N. Xiang, H. Yi, K. Chen, S. Wang, Z. Ni, "Investigation of the maskless lithography technique for the rapid and cost-effective prototyping of microfluidic devices in laboratories", Journal Of Micromechanics And Microengineering, Vol. 23, 2013. |
4 | M. Seo, H. Kim, M Park, "Maskless Lithographic Pattern Generation System upon Micromirrors", Computer-Aided Design & Applications, Vol. 3, No. 1-4, pp. 185-192, 2006. DOI: https://doi.org/10.1080/16864360.2006.10738455 DOI |
5 | J. K. Luo, M. Pritschow, A. J. Flewitt, S. M. Spearing, N. A. Fleck, W. I. Milne, "Effects of Process Conditions on Properties of Electroplated Ni Thin Films for Microsystem Applications", Journal of The Electrochemical Society, Vol. 153, No. 10, pp. 155-161, 2006. DOI: https://doi.org/10.1149/1.2223302 DOI |
6 | M. Manna, M Dutta, "Effect of prior electro or electroless Ni plating layer in galvanizing and galvannealing behavior of high strength steel sheet", SURFACE & COATING TECHNOLOGY, vol. 316, pp. 48-58, 2016 DOI: https://doi.org/10.1016/j.surfcoat.2016.12.067 DOI |
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