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http://dx.doi.org/10.5762/KAIS.2017.18.10.97

Improvement of Measurement Accuracy by Correcting Systematic Error Associated with the X-ray Diffractometer  

Choi, Dooho (Division of Advanced Materials Engineering, Dong-Eui University)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.18, no.10, 2017 , pp. 97-101 More about this Journal
Abstract
X-ray diffractometers are used to characterize material properties, such as the phase, texture, lattice constant and residual stress, based on the diffracted beams obtained from specimens. Quantitative analyses using X-rays are typically conducted by measuring the peak positions of the diffracted beams. However, the long-term use of the diffractomer, like any other machine, results in errors associated with the mechanical parts, which can deteriorate the accuracy of the quantitative analyses. In this study, the process of correcting systematic errors in the $2{\theta}$ range of $30{\sim}90^{\circ}$ is discussed, for which strain-free Si powders from NIST were used as the standard specimens. For the evaluation of the impact of such error correction, we conducted a quantitative analysis of the true lattice constant for tungsten thin films.
Keywords
diffraction; lattice constant; residual stress; systematic error; x-ray diffractometer;
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  • Reference
1 B. E. Warren, "X-ray Diffraction," Dover 1990.
2 B. D. Cullity and S. R. Stock, "Elements of X-ray Diffraction (3rd Edition)," Pearson 2001.
3 C. Suryanarayana and M. G. Norton, "X-ray Diffraction: A Practical Approach," Springer, 1998. DOI: https://doi.org/10.1007/978-1-4899-0148-4
4 C.-H. Ma, J.-H. Huang and H. Chen, "Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction," Thin Solid Films, vol. 418, pp. 73-78, 2002. DOI: https://doi.org/10.1016/S0040-6090(02)00680-6   DOI
5 X. Zheng, J. Li and Y. Zhou, "X-ray diffraction measurement of residual stress in PZT thin films prepared by pulsed laser deposition," Acta Mater, vol. 52, pp. 3313-3322, 2004. DOI: https://doi.org/10.1016/j.actamat.2004.02.047   DOI
6 M. Muntwiler, W. Auwarter, F. Baumberger, M. Hoesch, T. Greber and J. Osterwalder, "Determining adsorbate structures from substrate emission X-ray photoelectron diffraction," Surf. Sci. vol. 472, pp. 125-132, 2001. DOI: https://doi.org/10.1016/S0039-6028(00)00928-6   DOI
7 P.-O. Renault, K. F. Badawi, L. Bimbault, Ph. Goudeau, E. Elkaim and J. P. Lauriat, "Poisson's ratio measurement in tungsten thin films combining an x-ray diffractometer with in situ tensile tester," Appl. Phys. Lett., vol. 73, pp. 1952-1954, 1998. DOI: https://doi.org/10.1063/1.122332   DOI
8 I. C. Noyan and J. B. Cohen, "An X-ray diffraction study of the residual stress-strain distributions in shot-peened two-phase brass," Mater. Sci. & Eng. vol. 75, pp. 179-193, 1985. DOI: https://doi.org/10.1016/0025-5416(85)90188-0   DOI
9 A. Bensely, S. Venkatesh, D. M. Lal, G. Nagarajan, A. Rajadurai and K. Junil, "Effect of cryogenic treatment on distribution of residual stress in case carburized En 353 steel," Mater. Sci. & Eng. A, vol. 479, pp. 229-235, 2008. DOI: https://doi.org/10.1016/j.msea.2007.07.035   DOI
10 G. Cornella, S.-H. Lee, W. D. Nix and J. C. Bravman, An analkysis technique for extraction of thin film stresses from x-ray data, Appl. Phys. Lett, vol. 71, pp. 2949-2951, 1997. DOI: https://doi.org/10.1063/1.120225   DOI
11 Y.-W. Zhao, Y.-J. Wang, X.-Y. Jin, P. Jia, L. Chen, Y. Zhou, G.-M. Song, J.-P. Li, Z.-H. Feng, "Microstructure and properties of ZrC-W composite fabricated by reactive infiltration of $Zr_2Cu$ into WC/W preform," Mater. Chem. & Phys., vol. 153, pp. 17-22, 2015. DOI: https://doi.org/10.1016/j.matchemphys.2014.12.029   DOI