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S, K. Kim, W. Y. Lee, H. S. Kang, "A study on substrate stage temperature", KSDET, Vol. 5, No. 4, pp. 35-40, 2006.
과학기술학회마을
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J.H. Ahn, K. T. Kang, K. H. Ahn, "Development and Evaluation of Differential Pressure Type Mass Flow Controller for Semiconductor Fabrication Processing", KSDET, Vol. 7, No. 3, pp. 29-34, 2008.
과학기술학회마을
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W. S, Y. Kim, Y. J. Kim., "Numerical analysis on Heat Transfer Characteristics in a Lamp House", KSME, pp. 183-188, 2005.
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J. J. Kim1, S. B. Kim, G. S. Ham, H. M .Jo, J. K. Kim, "Improvement of Pattern Uniformity by Controlling Thermal Expansion of Mirror System", KSPE, pp. 719-720, 2013.
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D. B. Spalding, B. E. Launder, "The numerical computation of turbulent flows", CMAME, Vol. 3, pp. 269-289, 1974
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H. Joardar, N.S. Das, G. Sutradhar, S. Singhc, "Application of response surface methodology for determining cutting force model in turning of LM6/SiCP metal matrix composite", Measurement, Vol. 47, pp. 452-464, 2014 DOI: http://dx.doi.org/10.1016/j.measurement.2013.09.023
DOI
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J. Kim, E. Jeon, "Optimization of Ingredients for Vacuum Glazing Pillar Using DOE" KAIS, Vol. 13, No. 3 pp. 1002-1007, 2012 DOI: http://dx.doi.org/10.5762/KAIS.2012.13.3.1002
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