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A Simulation Study for Analyzing an on-Demand Semiconductor Wafer Process  

Kim, Ki-Young (Logistics Program of International Relations Division, Dongseo University)
Lee, Jung-Ho (Department of Industrial Engineering, Pusan National University)
Kang, Chang-Ho (Department of Industrial Engineering, Pusan National University)
Kim, Kap-Hwan (Department of Industrial Engineering, Pusan National University)
Publication Information
IE interfaces / v.18, no.1, 2005 , pp. 22-34 More about this Journal
Abstract
This paper introduces a simulation model which is based on the process analysis of a semiconductor company. The objective of the simulation modelis not only to estimate the overall performancesof the company but also to evaluate the performances of various operation rules for shop floor control. First, in order to develop the simulation model, a time study is performed for each process after analyzing the processes for the company. Second, by using ARENA, a simulation model is constructed based on the process analysis and the time study. After the simulation model is tested and run, its results are discussed.
Keywords
semiconductor; wafer; production; simulation;
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