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Characteristics of Particle Deposition onto the Cleanroom Wall Panel with Electrostatic Voltages  

Noh, Kwang-Chul (Department of Mechanical and Information Engineering University of Seoul)
Son, Young-Tae (MCC TG of Manufacturing Engineering R&D Institute, Samsung Electro-Mechanics Co., Ltd.)
Kim, Jong-Jun (Department of Mechanical and Information Engineering University of Seoul)
Oh, Myung-Do (Department of Mechanical and Information Engineering University of Seoul)
Publication Information
Korean Journal of Air-Conditioning and Refrigeration Engineering / v.18, no.12, 2006 , pp. 1033-1038 More about this Journal
Abstract
We carried out the experiments on particle deposition onto the cleanroom wall panels. And then we investigated the particle deposition characteristic coefficients for electrostatic voltages and particle size. It was found that there is little difference in characteristics of the particle deposition between the steel panel and the anti-static coating panel. In case of that the particle size is under $1.0{\mu}m$, the particle deposition characteristic coefficient becomes larger as the electrostatic voltage induced to the cleanroom wall panel is increasing. Where in case of that the particle size is over $3.0{\mu}m$, the particle deposition characteristic coefficients do not show any differences with the electrostatic voltages. It is due to that the electrostatic force is the major particle transport mechanism for submicron particles, while the gravitational settling is the major particle transport mechanism for overmicron particles when the electro-static voltages are induced to the cleanroom wall panel.
Keywords
Cleanroom; Cleanroom wall panel; Electrostatic voltage; Particle deposition;
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1 Kang, S. H., Jeon, W. P. and Oh, M. D., 1990, Effects of the floor panel on flows in a vertical laminar flow type clean room, Korean Journal of Air-Conditioning and Refrigeration, Vol. 2, No.4, pp.303-315
2 KACA-1998-01, 2003, A Standard of Indoor Air Cleaner, Korea Air Cleaning Association
3 Noh, K. C., Oh, M. D. and Lee, S. C., 2005, A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process, Building and Environment, Vol. 40, pp.1431-1440   DOI   ScienceOn
4 Whyte, W.,. 2001, Cleanroom TechnologyFundamentals of Design, Testing and Operation, John Willy & Sons, Chichester, England
5 Ahn, K. H., Bae, G. N. and Lee, C. S., 1996, Particle deposition velocity on a rotating wafer, Proceedings of the 13th International Symposium on Contamination Control, pp. 465-469
6 Yoo, K. H., Oh, M. D. and Myung, R. K., 1997, Analysis on particle deposition onto a heated, horizontal freestanding wafer with electrostatic effect, Journal of KSME, Vol. 21, No. 10, pp. 1284-1293   과학기술학회마을
7 Bae, G. N., Lim, H. K. and Oh, M. D., 1989, A experimental study on the airflow characteristics for clean tunnel type cleanroom design, Korean Journal of Air-Conditioning and Refrigeration, Vol. 1, No.1, pp.32-45
8 Bae, G. N., 1994, Measurement and control of particle deposition velocity on a semiconductor wafer surface, Ph. D. Thesis, Korea Advanced Institute of Science and Technology, Daejeon, Korea