Characteristics of Particle Deposition onto the Cleanroom Wall Panel with Electrostatic Voltages |
Noh, Kwang-Chul
(Department of Mechanical and Information Engineering University of Seoul)
Son, Young-Tae (MCC TG of Manufacturing Engineering R&D Institute, Samsung Electro-Mechanics Co., Ltd.) Kim, Jong-Jun (Department of Mechanical and Information Engineering University of Seoul) Oh, Myung-Do (Department of Mechanical and Information Engineering University of Seoul) |
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