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http://dx.doi.org/10.7844/kirr.2012.21.4.060

Trend on the Recycling Technologies for Silicon Sludge by the Patent and Paper Analysis  

Jang, Hee-Dong (Rare Metals Research Center, Korea Institute of Geoscience & Mineral Resources)
Kil, Dae-Sup (Rare Metals Research Center, Korea Institute of Geoscience & Mineral Resources)
Chang, Han-Kwon (Rare Metals Research Center, Korea Institute of Geoscience & Mineral Resources)
Cho, Young-Ju (R&D Center for Valuable Recycling)
Cho, Bong-Gyoo (R&D Center for Valuable Recycling)
Publication Information
Resources Recycling / v.21, no.4, 2012 , pp. 60-68 More about this Journal
Abstract
Silicon wafer for making semiconductor devices and solar cell is used in the semiconductor and solar industry, respectively. Silicon wafer is produced by cutting with silicon ingot and sludge contains silicon occurs from cutting process. Generation of silicon sludge is increasing on developing all industry sectors which have need of semiconductor device. These days it has been widely studied for the recycling technologies of the silicon sludge from view points of economy and efficiency. In this paper, patents and paper on the recycling technologies of the silicon sludge were analyzed. The range of search was limited in the open patents of USA (US), European Union (EU), Japan (JP), Korea (KR) and SCI journals from 1982 to 2011. Patents and journals were collected using key-words searching and filtered by filtering criteria. The trends of the patents and journals was analyzed by the years, countries, companies, and technologies.
Keywords
Silicon sludge recycling; Patent; paper; Analysis; Technical trend;
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