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Study on recovery of $Na_{2}SiF_6$ and acetic acid from waste acid produced during semiconductor wafer process  

Kim, Hyun-Sang (R&D center, NIT Co., Ltd. R&D center, Daeil Development Co., Ltd.)
Kim, Ju-Yup (Dept. of civil engineering, Hanyang University)
Lee, Hyang-Sook (R&D center, NIT Co., Ltd. R&D center, Daeil Development Co., Ltd.)
Shin, Chang-Hoon (R&D center, NIT Co., Ltd. R&D center, Daeil Development Co., Ltd.)
Kim, Jun-Young (R&D center, NIT Co., Ltd. R&D center, Daeil Development Co., Ltd.)
Bae, Woo-Keun (Dept. of civil engineering, Hanyang University)
Ahn, Jong-Kwan (Korea Institute of Geoscience and Mineral Resources)
Publication Information
Resources Recycling / v.17, no.5, 2008 , pp. 3-10 More about this Journal
Abstract
We researched recycle of mixed waste acids including HF, $CH_{3}COOH$, $HNO_3$ produced during semiconductor wafer process. At first, we recovered HF in form of $Na_{2}SiF_6$ by precipitation using $NaNO_3$ and $Na_{2}SiO_3$. Concentration of HF was made down from 110 g/L, initial concectration, to 0.5 g/L and Recovery rate of HF was 99.5%. After recovery of HF, concentration of $HNO_3$ and $CH_{3}COOH$ is 498 g/L, 265 g/L respectively. From that mixed acid, we recovered $CH_{3}COOH$ using 2 stages of fractional distillation. In first stage, $CH_{3}COOH$ was distilled for separation from $HNO_3$. And in second stage, we recoverd refined $CH_{3}COOH$ by using fractional distillation for removing a little amount of $HNO_3$ in $CH_{3}COOH$ vapor. The concentration of recovered $CH_{3}COOH$ in second stage is 20% and finally recovery rate of $CH_{3}COOH$ is about 87.5%.
Keywords
$Na_{2}SiF_6$; precipitation; fractional distillation; hydrofluoric acid; acetic acid;
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1 이향숙, 김준영, 김주엽, 안재우, 소순섭, 정동화, 2006년 : 반도체 생산 공정에서 배출되는 폐산중 초산과 질산의 혼합산 분리를 위한 기초 연구, 한국자원리싸이클링학회 추계학술대회 (2006. 11), pp. 137-141
2 Hu Xinglan, Miao Wenjun, and Zhou Rongqi, 2004 : Simulation of extrative distillation of acetic acid-water, Computers and applied chemistry(China), 21(6), pp. 828-830
3 Saha B., Chopade S. P., and Mahajani S. M., 2000 : Recovery of dilute acetic acid through esterification in a reactive distillation column, Catalysis Today, 60, pp. 147-157   DOI   ScienceOn
4 Kuylerstierna. U. and Otteryun H., 1974 : Solvent Extraction of $HNO_3$-HF from Stainless Pickling Solutions, Proceedings from the International Solvent Extraction Conference. 3, pp. 2803-2816, Lyon, France
5 Tongwen, X. and Weihua, Y., 2003 : Industrial recovery of mixed acid (HF + HNO3) from the titanium spent leaching solutions by diffusion dialysis with a new series of anion exchange membranes, Journal of membrane science, 220, pp. 89-95   DOI   ScienceOn
6 Seo Y. H., Nahm K. S., Hahn Y. B., Kim C. B., 1994 : Reaction kinetics of silicon etching in HF-K2Cr2O7-H2O solution, Korean J. of Chem. Eng., 11(2), p. 89-95   DOI
7 Yu, L., Guo, Q., Hao, J., Jiang, and Weihua, Y., 2000 : Recovery of acetic acid from dilute wastewater by means of bipolar membrane electrodialysis , Desalination, 129(3), pp. 283-288   DOI   ScienceOn
8 Zhigang Lei, Chengyue Li, Yingxia Li, and Biaohua Chen, 2004 : Separation of acetic acid and water by complex extractive distillation, Separation and Purification Technology, 36, pp. 131-138   DOI   ScienceOn
9 Anasthas, H. M. and Gaikar, V. G., 2001 : Adsorption of acetic acid on ion-exchange resins in non-aqueous conditions, Reactive & functional polymers, 47(1), pp. 23-35   DOI   ScienceOn
10 Bock Heiko, Jimoh Mohammed, Wozny Guenter, Analysis of reactive distillation using the esterfication of acetic acid as an example, Chemical engineering&technology, 20(3), pp. 182-191
11 http://www.huchems.com/product/product_d.html?sn=3 (인터넷 자료)
12 Yamamoto. A., et al., 1979: Recovery Process of Nitric and Hydrofluoric Acids from Waste Pickling Solutions for stainiess steel, Nissin steel Gihou, 40, pp. 49-54