Study on recovery of and acetic acid from waste acid produced during semiconductor wafer process |
Kim, Hyun-Sang
(R&D center, NIT Co., Ltd. R&D center, Daeil Development Co., Ltd.)
Kim, Ju-Yup (Dept. of civil engineering, Hanyang University) Lee, Hyang-Sook (R&D center, NIT Co., Ltd. R&D center, Daeil Development Co., Ltd.) Shin, Chang-Hoon (R&D center, NIT Co., Ltd. R&D center, Daeil Development Co., Ltd.) Kim, Jun-Young (R&D center, NIT Co., Ltd. R&D center, Daeil Development Co., Ltd.) Bae, Woo-Keun (Dept. of civil engineering, Hanyang University) Ahn, Jong-Kwan (Korea Institute of Geoscience and Mineral Resources) |
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