A study on the Separation of Acetic Acid, Nitric Acid and Hydrofluoric Acid from Waste Etching Solution of Si Wafer Manufacturing Process |
Kim, Jun-Young
(Daeil Development R&D center)
Lee, Hyang-Sook (Daeil Development R&D center) Shin, Chang-Hoon (Daeil Development R&D center) Kim, Ju-Yup (Daeil Development R&D center) Kim, Hyun-Sang (Daeil Development R&D center) Ahn, Jae-Woo (Department of Advanced Materials Sci. & Eng. Daejin University) |
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