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A study on the Separation of Acetic Acid, Nitric Acid and Hydrofluoric Acid from Waste Etching Solution of Si Wafer Manufacturing Process  

Kim, Jun-Young (Daeil Development R&D center)
Lee, Hyang-Sook (Daeil Development R&D center)
Shin, Chang-Hoon (Daeil Development R&D center)
Kim, Ju-Yup (Daeil Development R&D center)
Kim, Hyun-Sang (Daeil Development R&D center)
Ahn, Jae-Woo (Department of Advanced Materials Sci. & Eng. Daejin University)
Publication Information
Resources Recycling / v.16, no.1, 2007 , pp. 59-67 More about this Journal
Abstract
Recovery of acids from the waste etching solution of containing acetic, nitric and hydrofluoric acid discharged from silicon wafer manufacturing process has been attempted by using solvent extraction method. EHA(2-Ethylhexlalcohol) for acetic acid and TBP(Tri-butly Phosphate) for nitric and hydrofluoric acid as a extraction agent was used to the experiment to obtain the process design data in separation procedure. From the experimental data and McCabe-Thiele diagram analysis, we obtained the optimum conditions of phase ratio(O/A) and stages to separate each acid sequently from the mixed acids. The recovery yield was obtained above 90% for acetic acid from the acid mixtures, 90% for nitric acid from acetic acid extraction raffinate and then above 67% for hydrofluoric acid from final extraction raffinate.
Keywords
solvent extraction; acetic arid; nitric acid; hrdrofluoric acid; acid recovery; EHA(2-Ethylhexlalcohol); TBP(Tri-butly phosphate);
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  • Reference
1 Jeaneth dos S. Benedetto, Carlos A. Morais and Percy A. Bocardo, 2005 : 'Recovery of Nitric and Hydrofluoric Acids from Industral Waste'. Proceedings from the International Solvent Extraction Conference, pp. 485-489
2 Yamamoto, A., T. Fujita, E. Doi and Y. Fujiwaki, 1979 : 'Recovery Process of Nitric and Hydrofluoric Acids from Waste Pickling Solutions for Stainless Steel'. Nissan Steel Gihou, 40, pp. 49-54
3 King, C.J., 1983 : Handbook of solvent extraction, pp. 567. 573 A Wiley-Interscience Publication
4 오종기 외, 1993 : '난분해성 특정산업 폐수처리 기술' 과학기술처 연구보고서
5 Shibata, J., 2001 : 'Chemistry in Solvent Extraction' Short Course on Materials Processing, Sept. 2001, Shigen To Sozai, pp. 32-77
6 Eyal, A.M., 1989 : 'Hydrofluoric Acid Extraction by TBP and by Amines', Solvent extraction and ion exchange, 7, pp. 951-986   DOI   ScienceOn
7 Nishimura, S. and Shibata, J., 1976 : 'Treatment of Waste Water Containing Heavy Metal Ions by Solvent Extraction' Flotation, 23, pp. 64-73
8 Hesford, E. and Mckay, H.A.C., 1960 : 'The Extraction of Mineral Acids by Tri-n-Butyl Phosphate (TBP)', Journal of inorganic and nuclear chemistry, 13, pp. 156-164   DOI   ScienceOn
9 Tanaka, M. and Akaiwa, H. 2002 : Solvent Extraction Chemstry, pp. 109-111. Shokabo Tokyo, Japan
10 Yu, Z., Valiente, M., and Muhammed, M., 1989 : 'Extraction of Nitric and Phospjoric Acids with Tributyl phosphate', Solvent extraction and ion exchange, 7, pp. 173-200   DOI   ScienceOn