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Laser microstructuring of trench and its application to optical waveguide  

Choi, Hun-Kook (Advanced Photonics Research Institute, GIST)
Yoo, Dongyoon (Advanced Photonics Research Institute, GIST)
Sohn, Ik-Bu (Advanced Photonics Research Institute, GIST)
Noh, Young-Chul (Advanced Photonics Research Institute, GIST)
Kim, Young-Sic (Photonics Planar Integration Inc.)
Kim, Su-yong (Photonics Planar Integration Inc.)
Kim, Wan-Chun (Photonics Planar Integration Inc.)
Kim, Jin-Bong (Photonics Planar Integration Inc.)
Publication Information
Laser Solutions / v.18, no.1, 2015 , pp. 7-11 More about this Journal
Abstract
In this paper, micro trench structure is fabricated by femtosecond laser for inserting optical reflecting wavelength filter in planar waveguide. The width and depth of the trench is controlled by femtosecond laser machining condition. Also, large scale of single channel with 500um and 1000um on silica plate is fabricated by femtosecond laser, and roughness of the channel surface is polished by $CO_2$ laser for the insertion of the filter. Then, the characteristic of the planar waveguide inserted the filter is verified.
Keywords
Femtosecond laser; $CO_2$ laser; trench; channel; waveguide; wavelength filter;
Citations & Related Records
Times Cited By KSCI : 5  (Citation Analysis)
연도 인용수 순위
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