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http://dx.doi.org/10.5695/JKISE.2017.50.5.392

High-speed Microcantilever Resonance Testing on the Young's Modulus of a Nanoscale Titanium Film  

Kim, Yun Young (Division of Mechanical, Automotive, and Robot Component Engineering, Dong-eui University)
Publication Information
Journal of the Korean institute of surface engineering / v.50, no.5, 2017 , pp. 392-397 More about this Journal
Abstract
The Young's modulus of a nanoscale titanium (Ti) thin-film was evaluated using a high-speed microcantilever resonating at the megahertz frequency in the present study. A 350 nm thick Ti film was deposited on the surface of a silicon microcantilever, and the morphology of the film was analyzed using the atomic force microscopy. The microcantilever was excited to resonate using an ultrasonic pulser that generates tone burst signals and the resonance frequency shift induced by the deposition of Ti was measured using a Michelson interferometer. The Young's modulus was determined through a modal analysis using the finite element method and the result was validated by the nanoindentation testing, showing good agreement within a relative error of 1.0%. The present study proposes a nanomechanical characterization technique with enhanced accuracy and sensitivity.
Keywords
Microcantilever; Resonance testing; Titanium; Thin film; Young's modulus;
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Times Cited By KSCI : 1  (Citation Analysis)
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1 Kyu-Baik Chang, Yun Young Kim, Jiwoong Sue, Hojoon Lee, Won-Young Chung, Keun-Ho Lee, Young-Kwan Park, EunSeung Jung, and Ilsub Chung, The novel stress simulation method for contemporary DRAM capacitor arrays, Simulation of Semiconductor Processes and Devices (SISPAD), 2013 International Conference on, IEEE (2013) 424-427.
2 Thomas P. Burg, Amir R. Mirza, Nebojsa Milovic, Christine H. Tsau, George A. Popescu, John S. Foster, and Scott R. Manalis, Vacuum-packaged suspended microchannel resonant mass sensor for biomolecular detection, J. Microelectromech. Syst. 15 (2006) 1466-1476.   DOI
3 Kyung-Cho Kim, Hisashi Yamawaki, and Kyung-Young Jhang, Detection of laser generated ultrasonic wave using Michelson interferometer, J. Korean Soc. Nondestr. Test. 20 (2000) 27-32.
4 Yongqing Fu, Hejun Du, Weimin Huang, Sam Zhang, and Min Hu, TiNi-based thin films in MEMS applications: a review, Sens. Actuators A 112 (2004) 395-408.   DOI
5 Yun Young Kim, Seonwook Lee, Jiwon Park, and Younho Cho, Ultrasonic characterization of a resonating high-speed microcantilever, Trans. Korean Soc. Mech. Eng. A 41 (2017) 483-489.
6 Warren C. Oliver and George M. Pharr, An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments, J. Mater. Res. 7 (1992) 1564-1583.   DOI
7 Conor O'Mahony, Martin Hill, Padraig J. Hughes, and William A. Lane, Titanium as a micromechanical material, J. Micromech. Microeng. 12 (2002), 438-443.   DOI
8 Toshiyuki Tsuchiya, Masakazu Hirata, and Norio Chiba, Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films, Thin Solid Films 484 (2005) 245-250.   DOI
9 Kuraganti Vasu, Mamidipudi Ghanashyam Krishna, and Kuppuswamy Anantha Padmanabhan, Nanomechanical behavior of (1 0 0) oriented titanium thin films, Eur. Phys. J. Appl. Phys. 65 (2004) 30302.
10 Toshiyuki Tsuchiya, Masakazu Hirata, Norio Chiba, Ryujiro Udo, Yuji Yoshitomi, Taeko Ando, Kazuo Sato, Kazuki Takashima, Yakichi Higo, and Yasunori Saotome, Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films, J. Microelectromech. Syst. 14 (2005), 1178-1186.   DOI