Effect of Si Content on the Phase Formation Behavior and Surface Properties of the Cr-Si-Al-N Coatings
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Choi, Seon-A
(Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology)
Kim, Hyung-Sun (Department of Materials Science and Engineering, Inha University) Kim, Seong-Won (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) Lee, Sungmin (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) Kim, Hyung-Tae (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) Oh, Yoon-Suk (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology) |
1 | H. C. Barshilia, A. Jain, and K. Rajam, Structure, hardness and thermal stability of nanolayered TiN/CrN multilayer coatings, Vacuum. 72 (2003) 241-248. DOI |
2 | P. Mayrhofer, G. Tischler, and C. Mitterer. Microstructure and mechanical/thermal properties of Cr-N coatings deposited by reactive unbalanced magnetron sputtering. Surf. coat. Technol. 142 (2001) 78-84. |
3 | J. Caicedo, C. Amaya, L. Yate, O. Nos, M. Gomez, and P. Prieto. Hard coating performance enhancement by using [Ti/TiN] n,[Zr/ZrN] n and [TiN/ZrN] n multilayer system. J. Mater. Sci. Emg. B. 171 (2010) 56-61. DOI |
4 | J. B. Choi, K. Cho, M. Lee, K. H. Kim. Effects of Si content and free Si on oxidation behavior of Ti-Si-N coating layers Thin Solid Films. 447 (2004) 365-370. |
5 | Y. Chim, X. Ding, X. Zeng, and S. Zhang. Oxidation resistance of TiN, CrN, TiAlN and CrAlN coatings deposited by lateral rotating cathode arc. Thin Solid Films. 517 (2009) 4845-4849. DOI |
6 | G Abadias, L Koutsokeras, A Siozios, P Patsalas. Stress, phase stability and oxidation resistance of ternary Ti-Me-N (Me= Zr, Ta) hard coatings. Thin Solid Films. 538 (2013) 56-70. DOI |
7 | I.-W. Park, D. S. Kang, J. J. Moore, S. C. Kwon, J. J. Rha, and K. H. Kim. Microstructures, mechanical properties, and tribological behaviors of Cr-Al-N, Cr-Si-N, and Cr-Al-Si-N coatings by a hybrid coating system. Surf. coat. Technol. 201(2007) 5223-5227. DOI |
8 | D. Mercs, N. Bonasso, S. Naamane, J.-M. Bordes, and C. Coddet. Mechanical and tribological properties of Cr-N and Cr-SI-N coatings reactively sputter deposited Surf. coat. Technol. 200 (2005) 403-407. DOI |
9 | H. C. Barshilia, N. Selvakumar, B. Deepthi, and K. Rajam. A comparative study of reactive direct current magnetron sputtered CrAlN and CrN coatings. Surf. coat. Technol. 201 (2006) 2193-2201. DOI |
10 | M. Brizuela, A. Garcia-Luis, I. Braceras, J. Onate, J. Sanchez-Lopez, D. Martinez-Martinez, C. Lopez-Cartes, and A. Fernandez. Magnetron sputtering of Cr (Al) N coatings: mechanical and tribological study. Surf. coat. Technol. 200 (2005) 192-197. DOI |
11 | E. Fornies, R. E. Galindo, O. Sanchez, and J. Albella. Growth of CrN x films by DC reactive magnetron sputtering at constant N 2/Ar gas flow. Surf. coat. Technol. 200 (2006) 6047-6053. DOI |
12 | D. Depla, J. Haemers, and R. De Gryse. Target surface condition during reactive glow discharge sputtering of copper Plasma Sources. Sci. Technol. 11 (2002) 91. |
13 | S. Berg and T. Nyberg. Fundamental understanding and modeling of reactive sputtering processes. Thin solid films. 476 (2005) 215-230. DOI |
14 | Y. H. Yang, I. W. Lyo, S. J. Park, D. S. Lim and Y. S. Oh. Tribology and Phase Evolution of Cr-Mo-N coatings with different lnterlayer condition. J. Kor. Surf. Eng. 44 (2011) 269-276. DOI |
15 | Y. S. Hong, S. H. Kwon, W. Tiegang, K. Doo-In, C. Jihwan, and K. H. Kim. Effects of Cr interlayer on mechanical and tribological properties of Cr-Al-Si-N nanocomposite coating. Trans. Nonferrous Met. Soc. China. 21 (2011) s62-67. DOI |
16 | J.-W. Lee and Y.-C. Chang. A study on the microstructures and mechanical properties of pulsed DC reactive magnetron sputtered Cr-Si-N nanocomposite coatings. Surf. coat. Technol. 202 (2007) 831-836. DOI |
17 | A. ozturk, K. V. Ezirmik, K. Kazmanli, M. Urgen, O. L. Eryilmaz, A. Erdemir. Comparative tribological behaviors of TiN-, CrN- and MoN-Cu nanocomposite coatings. Tribology International. 41 (2008) 49-59. DOI |
18 | P. M. Martin. Handbook of deposition technologies for films and coatings: science, applications and technology. William Andrew. (2009) 257. |
19 | H.-W. Chen, Y.-C. Chan, J.-W. Lee and J,-G. Duh. Oxidation behavior of Si-doped nanocomposite CrAlSiN coatings. Surface and Coatings Technology. 205 (2010) 1189-1194. DOI |
20 | K. Yamamoto, T. Sato and M. Takeda. Structural analysis of (Cr1-xSix)N coatings and tribological property in water environment Surf. Coat. Technol. 193 (2003) 167-172 |
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