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http://dx.doi.org/10.5695/JKISE.2015.48.6.292

Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering  

Kim, Dong Ryeol (Department of Materials Science and Engineering, Pusan National University)
Bae, Ji Hwan (Department of Materials Science and Engineering, Pusan National University)
Hwang, Dong Hyun (Department of Materials Science and Engineering, Silla University)
Son, Young Guk (Department of Materials Science and Engineering, Pusan National University)
Publication Information
Journal of the Korean institute of surface engineering / v.48, no.6, 2015 , pp. 292-296 More about this Journal
Abstract
Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from $100^{\circ}C$ to $400^{\circ}C$. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at $200^{\circ}C$. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at $200^{\circ}C$ all substrates temperature.
Keywords
ITZO; transmittance; RF Magnetron sputtering; thin film;
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1 J. W. Seo, Y. H. Joung, S. J. Kang ; J. Kor Inst. Inf. Commun. Eng., 17 (2013) 1874.
2 Y. S. Kim, W. J. Hwang, K. T. Eun, S. H. Choa ; Appl. Surf. Scie., 257 (2011) 8134.   DOI
3 S. H. Kwon, Y. M. Kang, Y. R. Cho, S. H. Kim, P. K. Song ; Surf. Coat. Technol., 205 (2010) 312.   DOI
4 S. Tomai, H. Hayasaka, M. Sunagawa, E. Kawashima, S. Ishii, M. Nishimura, M. Kasami, K. Yano, D. Wang, M. Furuta ; Electrochem. Solid State Lett., 12 (2013) 107.
5 M. H. Kim, H. S. Lee ; Solid State Elec., 96 (2014) 14.   DOI
6 S. Y. Lee, Y. R. Denny, K. I. Lee, N. S. Park, H. J. Kang ; New Physics: Sae Mulli, 6 (63) (2013) 675.
7 H. Koseoglu, F. Turkoglu, M. Kurt, M. D. Yaman, F. G. Akca, G. Aygun, L. Ozyuzer ; Vacuum 120 (2015) 8.   DOI
8 S. S. Lee, N. R. Lee, K. I. Kim, T. W. Hong ; Clean Tech., 18 (2012) 69.   DOI
9 S. H. Kim, D. I. Kim ; Cera. Int., 41 (2015) 2771.
10 H. C. Cheng, C. Y. Tsay ; J. Alloys and Comp., 507 (2010) L1.   DOI
11 D. M. Lee, J. K. Kim, J. C. Hao, H. K. Kim, J. S. Yoon, J. M. Lee ; J. Alloys and Comp., 583 (2014) 535.   DOI
12 B. Z. Zhang, Z. Y. Wu, Y. D. Tao ; Cera. Int., 40 (2014) 7842.
13 Z. S. Hosseini, A. Mortezaali, A. Lraji zad ; Sensors And Actuators A 212 (2014) 81.
14 Teresa Oh ; Kor. J. Mater. Res., 23 (2013) 582
15 K. C. Lee, K. M. Jo, J. H. Lee, J. J. Kim, Y. W. Heo ; J. Kor. Inst. Surf. Eng., 47 (2014) 239.   DOI
16 B. D. Cullity, Elements of X-ray Diffractions, (Addison-Wesley, Reading, 1978) p. 102.
17 D. H. Hwang, J. H. Ahn, Y. K. Son ; J. KIEEME 24 (2011) 764.
18 M. Nisha, S. Anusha, Aldrin Antony, R. Manoj, M. K. Jayataj ; Appli. Surf. Scie. 252 (2005) 1433.