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http://dx.doi.org/10.5695/JKISE.2015.48.4.179

Analysis of contaminated QMS, cleaning and restoration of functions  

Kim, Donghoon (Department of Plasma Convergence Engineering, Kunsan National University)
Joo, Junghoon (Department of Plasma Convergence Engineering, Kunsan National University)
Publication Information
Journal of the Korean institute of surface engineering / v.48, no.4, 2015 , pp. 179-184 More about this Journal
Abstract
Quadrupole Mass Spectrometers (QMS) is a very useful tool in vacuum process diagnosis. Tungsten filament based ion sources are vulnerable to contamination from process gas monitoring. Common symptoms of quadrupole mass spectrometer malfunction is appearance of unwanted contaminant mass peaks or no detection of any ion peaks. We disassembled used quadrupole mass spectrometer and found out black insulating deposits on inside of ion source parts. Five steps of cleaning procedure were applied and almost full restoration of functions were confirmed in two types of closed ion source quadrupole mass spectrometer. By using a numerical modeling (CFD-ACE+) technique, the electric potential profile of ion source with/without insulating deposit was calculated and showed the possibility of quadrupole mass spectrometer malfunction by the deterioration of designed potential profile inside the ion source.
Keywords
QMS; ion source; filament; cleaning; CFD-ACE+;
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Times Cited By KSCI : 2  (Citation Analysis)
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