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http://dx.doi.org/10.5695/JKISE.2014.47.3.099

Encapsulation Method of Flexible OLED Using SiNx and Metal Film  

Lee, Hyoe Sun (Department of Advanced Materials Science & Engineering, Daejin University)
Ju, Sung-Hoo (Department of Advanced Materials Science & Engineering, Daejin University)
Publication Information
Journal of the Korean institute of surface engineering / v.47, no.3, 2014 , pp. 99-103 More about this Journal
Abstract
The encapsulation method of flexible organic light emitting devices (OLEDs) was investigated for the structure of ITO / 2-TNATA / NPB / $Alq_3$ : Rubrene (1 vol.%) / $Alq_3$ / LiF / Al / $Alq_3$ / LiF / Al (OLED #1), on which $SiN_x$ thin film was deposited and metal film was attached to protect the damage of OLED from oxygen and moisture. The $SiN_x$ thin film was deposited by plasma enhanced chemical vapor deposition (PECVD) method using $SiH_4$ of 20 sccm and $N_2$ of 15~35 sccm as reactor gases. The optimum $SiN_x$ deposition condition was found to be 20 sccm $SiH_4$ and 20 sccm $N_2$ from the Ca test of the fabricated $SiN_x$ thin film. The life time of OLED #1, OLED #1 / $SiN_x$ 200 nm, OLED #1 / $SiN_x$ 400 nm and OLED #1 / $SiN_x$ 400 nm / metal film was 7, 12, 25, and 45 hours, respectively. In conclusion, it has been shown that the lifetime of OLEDs can be improved more than 6 times by $SiN_x$ film and a metal film encapsulation.
Keywords
OLED; Encapsulation; Flexible; $SiN_x$; Metal film;
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Times Cited By KSCI : 1  (Citation Analysis)
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