Characteristics of NbN Films Deposited on AISI 304 Using Inductively Coupled Plasma Assisted DC Magnetron Sputtering Method |
Jun, Shinhee
(School of Materials Science and Engineering, University of Ulsan)
Kim, Junho (Advanced Hybrid Production Technology Center, Korea Institute of Industrial Technology) Kim, Sunkwang (School of Materials Science and Engineering, University of Ulsan) You, Yong Zoo (School of Materials Science and Engineering, University of Ulsan) Cha, Byungchul (Advanced Hybrid Production Technology Center, Korea Institute of Industrial Technology) |
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