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http://dx.doi.org/10.5695/JKISE.2013.46.2.061

The Formation of CIGS Thin Films by Sputter Coating Using Single Composite Target and Change of Microstructure with Heat Treatment  

Song, Young Sik (Department of Metallurgy and Materials Engineering, Hanyang University)
Kim, Jongryoul (Department of Metallurgy and Materials Engineering, Hanyang University)
Publication Information
Journal of the Korean institute of surface engineering / v.46, no.2, 2013 , pp. 61-67 More about this Journal
Abstract
Thin film solar cells have attracted much attention due to their high cell efficiency, comparatively low process cost, and applicability to flexible substrates. In particular, CIGS solar cells have been widely studied and produced because they demonstrated the highest cell efficiency. However, the deposition process of CIGS films generally includes the selenization process conducted at elevated temperature using toxic $H_2Se$ gas. To avoid this selenization process, CIGS thin films were, in this study, deposited by RF sputtering using single composite CIGS target. In addition, the effects of sputtering bias voltage and heat treatment on the microstructural and morphological changes in deposited CIGS films were investigated and discussed.
Keywords
CIGS; Sputtering; Solar cell; Single composite target; Heat treatment; Microstructure;
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1 Markus E. Beck, A. Swartzlander-Guest, R. Matson, J. Keane, R. Noufi, Solar Energy Materials & Solar Cells, 64 (2000) 135.   DOI   ScienceOn
2 C. Suryanarayana, E. Ivanov, R. Noufi, M. A. Contreras, J. J. Moore, Thin Solid Films, 332 (1998) 340.   DOI   ScienceOn
3 F. Kessler, D. Herrmann, M. Powalla, Thin Solid Films, 480-481 (2005) 491.   DOI   ScienceOn
4 K. Herz, A. Eicke, F. Kessler, R. Wächter, M. Powalla, Thin Solid Films, 431-432 (2003) 392.   DOI   ScienceOn
5 T. Nakada, Thin Solid Films, 480-481 (2005) 419.   DOI   ScienceOn
6 L. Zhang, Q. He, W.-L. Jiang, F.-F. Liu, C.-J. Li, Y. Sun, Solar Energy Materials & Solar Cells, 93 (2009) 114.   DOI   ScienceOn
7 R. Wuerz, A. Eicke, M. Frankenfeld, F. Kessler, M. Powalla, P. Rogin, O. Yazdani-Assl, Thin Solid Films, 517 (2009) 2415.   DOI   ScienceOn
8 Neelkanth G. Dhere, Solar Energy Materials & Solar Cells, 90 (2006) 2181.   DOI   ScienceOn
9 D. Abou-Ras, M. A. Contreras, R. Noufi, H.-W. Schock, Thin Solid Films, 517 (2009) 2218.   DOI   ScienceOn
10 M. Kaelin, D. Rudmann, A. N. Tiwari, Solar Energy, 77 (2004) 749.   DOI   ScienceOn
11 G. S. Chen, J. C. Yang, Y. C. Chan, L. C. Yang, W. Huang, Solar Energy Materials & Solar Cells, 93 (2009) 1351.   DOI   ScienceOn
12 Alan E. Delahoy, L. Chen, M. Akhtar, B. Sang, S. Guo, Solar Energy, 77 (2004) 785.   DOI   ScienceOn