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http://dx.doi.org/10.5695/JKISE.2012.45.4.174

Numerical Modeling of a Rectangular Type Inductively Coupled Plasma System  

Joo, Jung-Hoon (Department of Materials Science and Engineering & Plasma Materials Research Center, Kunsan National University)
Publication Information
Journal of the Korean institute of surface engineering / v.45, no.4, 2012 , pp. 174-180 More about this Journal
Abstract
Low pressure inductively coupled plasma characteristics of argon and oxygen are numerically simulated for a 400 mm rectangular type system with a plasma fluid model. The results showed lower power absorption profile at the corner than a circular one in a 13.56 MHz driven 1.5 turn antenna system with a drift-diffusion and quasi-neutrality assumption. Ions controlled by electric field are more non-uniform than metastables and the power absorption profile of oxygen plasma is affected by horizontal gas flow pattern to show 25% lower power absorption at the pumping flange side. Oxygen negative ions which are generated in electron collisional dissociation of oxygen molecules was calculated as 0.1% of oxygen atoms with similar spatial profile.
Keywords
Inductively coupled plasma; Numerical modeling; Sputtering; Bipolar plate;
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Times Cited By KSCI : 4  (Citation Analysis)
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