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http://dx.doi.org/10.5695/JKISE.2009.42.2.086

Preparation of Al/Al2O3 Multilayer Coatings on NdFeB Permanent Magnet and their Corrosion Characteristics  

Jeong, J.I. (Facility & Automation Research Division, Research Institute of Industrial Science & Technology)
Yang, J.H. (Facility & Automation Research Division, Research Institute of Industrial Science & Technology)
Publication Information
Journal of the Korean institute of surface engineering / v.42, no.2, 2009 , pp. 86-94 More about this Journal
Abstract
Various types of multilayer coatings including Al/$Al_2O_3$ structure have been prepared on Nd-Fe-B permanent magnet to modify the morphology of the coating and to enhance the corrosion resistance of the magnet. Magnetron sputtering has been employed to make the multilayer coatings. $Al_2O_3$sputtering conditions were optimized in reactive sputtering by varying the deposition parameters. The formation of $Al_2O_3$ film was confirmed from the binding energy shift measured by electron spectroscopy for chemical analysis. 3 types of coating structures were designed and prepared by magnetron sputtering. The coating structures consist of (1) single Al coating, (2) modified coatings having oxide or plasma treated layer in the middle of coating structure, and (3) Al/$Al_2O_3$ multilayer coatings. Surface and cross-sectional morphologies showed that Al/$Al_2O_3$ multilayer grew as a layered structure, and that very compact Zone 3 like structure were formed. X-ray diffraction peak showed that the crystal orientations of multilayer coatings were similar to that of the bulk powder pattern. Hardness increased drastically when the Al thickness was around 1im in the Al/$Al_2O_3$ multilayer. From the salt spray test and pressure cooker test, it has been shown that the multilayer coatings showed good corrosion resistance compared to Al single or modified layer coatings.
Keywords
Nd-Fe-B permanent magnet; Multilayer coating; Reactive magnetron sputtering; Aluminum and $Al_2O_3$ film; Physical vapor deposition;
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Times Cited By KSCI : 2  (Citation Analysis)
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1 M. Sagawa, S. Fujimura, N. Togawa, M. Yamamoto, Y. Matsuura, J. Appl. Phys., 55 (1984) 2083   DOI   ScienceOn
2 D. F. Cygan, M. J. McNallan, J. Magn. Magn. Mater., 139 (1995) 131   DOI
3 E. Rozendall, IEEE Trans. Magn., 26 (1990) 2631   DOI   ScienceOn
4 K. Yosimura, T. Nishiuchi, F. Kikui, 國際公開番號 WO99/54890 (1999)
5 H. K. Pulker, Coatings on Glass (Elsevier Science Publishers B. V., Amsterdam, The Netherlands, 1984), Chap. 9 and references therein
6 N. A. G. Ahmed, Ion Plating Technology (John Wiley & Sons Ltd., 1987), Chap. 3 and 7, and references therein
7 박상은, 박세훈, Lue jie, 송풍근, 한국표면공학회지, 41(4) (2008) 142   DOI
8 M. Neirynck, W. Samaey, L. Van Poucke, J. Vac. Sci. Technol., 11(4) (1974) 647   DOI
9 김찬욱, 조기현, 석한길, 한국표면공학회지, 40(5) (2007) 214   DOI
10 D. S. Edgley, J. M. Le Breton, D. Lemarchand, I. R. Harris, J. Teillet, J. Magn. Magn. Mater., 128 (1993) L1   DOI   ScienceOn
11 C.-D. Qin, A. S. K. Li, D. H. L. Ng, J. Appl. Phys., 79(8) (1996) 4854   DOI   ScienceOn
12 C. J. William, K. S. V. L. Narashiman, J. Appl.Phys., 61 (1987) 15
13 L. Song, Y. Wang, W. Lin, Q. Liu, Surf. Coat. Technol., 202 (2008) 5146   DOI   ScienceOn
14 S. M. Tamborim Takeuchi, D. S. Azambuja, I. Costa, Surf. Coat. Technol., 201 (2006) 3670   DOI   ScienceOn
15 N. C. Ku, C-D. Qin, C. C. Yu, D. H. L. Ng, IEEE Trans. Mag., 32 (1988) 4407
16 D. Pramanik, A. N. Saxena, Solid State Technol., Part I. 26(1) (1983) 127
17 S. Hirosawa, S. Mino, H. Tomizawa, J. Appl. Phys. 69 (1991) 5844   DOI
18 S. Schiller, H. Forster, G. Hotzsch, G. Jasch, in Proc. of the Conf. on Electron Beam Melting and Refining, Part 2, edited by R. Bakish (Bakish Materials Corp., Englewood, 1989), p.155
19 K. Tokuhara, S. Hirosawa, J. Appl. Phys., 69 (1991) 5521   DOI
20 T. Minowa, H. Yoshikawa, M. Hoshima, IEEE Trans. Mag., 25 (1989) 3776   DOI   ScienceOn
21 J. Jacobson, A. Kim, J. Appl. Phys., 61 (1987) 3763   DOI
22 M. Sagawa, P. Tenaud, F. Vial, K. Hiraga, IEEE Trans. Magn., 26 (1990) 1957   DOI   ScienceOn
23 K. H. J. Buschow, Mater. Sci. Rep. 1 (1986) 1   DOI   ScienceOn
24 T. S. Chin, R. T. Chang, T. W. Tsai, and M. P. Hung, IEEE Trans. Mag., MAG-24 (1988) 1927
25 F. Kikui, M. Ikegami, K. Yosimura, 國際公開番號 WO98/09300 (1998)