Effects of Reactive Gas Addition on the Mechanical Property and Water Permeability of IZO Films Deposited by DC Sputtering for Application to Flexible OLED |
Cheon, Ko-Eun
(School of Materials Science and Engineering, Pusan National University)
Lee, Dong-Yeop (School of Materials Science and Engineering, Pusan National University) Cho, Young-Rae (School of Materials Science and Engineering, Pusan National University) Song, Pung-Keun (School of Materials Science and Engineering, Pusan National University) |
1 | C. H. Kim, J. H. Lee, B. O. Park, Mater. Sci. Forum, 449 (2004) 469 DOI |
2 | H. M. Kim, J. S. Ahn, K. C. Je, Jpn. J. Appl. Phys., 42 (2003) 5714 DOI |
3 | Y. F. Liew, F. Zhu, S. J. Chua, Chem. Phys. Lett. 394 (2004) 275 DOI ScienceOn |
4 | T. Sasabayashi, P. K. Song, Y. Shigesato, K. Utsumi, A. Mitsui, Mat. Res. Soc. Symp. Proc., 666 (2001) |
5 | L. Raniero, I. Ferreira, A. Pimentel, A. Goncalves, P. Canhola, E. Fortunato, R. Martins, Thin Solid Films, 511 (2006) 295 DOI ScienceOn |
6 | J. H. Bai, J. M. Moon, S. W. Jung, J. W. Gang, H. G. Kim, J. Korean lnst. Electr. Mater. Engn., 19 (2006) 1134 DOI |
7 | T. Sasabayashi, N. Ito, M. Kon, P. K. Song, I. Yasui, Jpn. J. Appl. Phys., 39 (2000) 6422 DOI |
8 | M. Ando, M. Takabatake, E. Nishimura, K. Onisawa, T. Minemura, J. Non-cryst. Solids, 28 (1996) 198 |
9 | P. K. Song, H. Akao, M. Kamei, Y. Shigesato, I. Yasui, Jpn. J. Appl. Phys., 38 (1999) 5224 DOI |
10 | A. Kaijyo, K. Inoue, S. Matsyzaki, Y. Shigesato, Proceedings for the PRICM-4, 2 (2001) 1787 |
11 | N. Ito, Y. Sato, P. K. Song, A. Kaijio, K. Inoue, Y. Shigesato, Thin Solid Films, 496 (2006) 99 DOI ScienceOn |
12 | J. S. Oh, Y. R. Cho, K. E. Cheon, M. Karim, S. J. Jung, Solid State Pheno., 124 (2007) 411 DOI |
13 | S. F. Lim, W. Wang, S. J. Chua, Adv. Func. Mater., 8 (2002) 513 |
14 | S. Gorkhali, D. R. Gairns, G. P. Craqwford, SID DIGEST, (2003) 1332 |
15 | S. H. Shin, H. H. Kim, J. Korean lnst. Electr. Mater. Engn., 17 (2004) 846 DOI |
16 | C. Charton, N. Schiller, M. Fahland, A. Hollander, A. Wedel, K. Noller, Thin Solid Films, 502 (2006) 99 DOI ScienceOn |
17 | M. Schaer, F. Nuesch, D. Berner, W. Leo, L. Zuppiroli, Adv. Func. Mater., 11 (2001) |
18 | T. J. Marks, J. G. C. Veinot, J. Cui, H. Yan, A. Wang, N. L. Edleman, J. Ni, Q. Huang, L, Synth. Met., 127 (2002) 29 DOI ScienceOn |
19 | K. E. Cheon, D. Y. Lee, Y. R Cho, G. H. Lee, P. K. Song, to be published in J. Korean Phys. Soc. (2007) |