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http://dx.doi.org/10.5695/JKISE.2007.40.5.203

Electro-Chemical Properties of Iridium Oxide Coated Ti Electrode Synthesized by Unbalanced Magnetron Sputtering Process  

Kim, Sung-Dae (Plasma Technology Center, Institute for Advanced Engineering)
Kim, Sang-Sik (Plasma Technology Center, Institute for Advanced Engineering)
Song, Jin-Ho (GREENPLA Co., Ltd.)
Publication Information
Journal of the Korean institute of surface engineering / v.40, no.5, 2007 , pp. 203-208 More about this Journal
Abstract
Preliminary studies were conducted to develop a dimensionally stable anode (DSA)electrode prepared by reactive sputtering method. The microstructure, surface morphology and electrochemical properties of iridium oxide $(IrO_2)$ coatings synthesized by unbalanced magnetron sputtering (UBMS) and conventional DSA electrode were compared. In addition, the possibilities of $IrO_2$ films synthesized by UMB on a real DSA electrode were investigated by electro-chemical application test. The degree of non-stoichiometry and surface area were closely related to the electro-chemical activity of the $IrO_2$ electrode. The feasibility of making a DSA electrode prepared by PVD technique was demonstrated through the present work.
Keywords
Unbalanced magnetron sputtering; DSA electrode; iridium oxide; Electrochemical properties;
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