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Microstructure and Mechanical Properties of Mo-Si-N Coatings Deposited by a Hybrid Coating System  

Heo, Su-Jeong (Division of Materials Science and Engineering, Pusan National University)
Yun, Ji-Hwan (Division of Materials Science and Engineering, Pusan National University)
Kang, Myung-Chang (Division of Materials Science and Engineering, Pusan National University)
Kim, Kwang-Ho (Division of Materials Science and Engineering, Pusan National University)
Publication Information
Journal of the Korean institute of surface engineering / v.39, no.3, 2006 , pp. 110-114 More about this Journal
Abstract
In this work, comparative studies on microstructure and mechanical properties between $Mo_2N$ and Mo-Si-N coatings were conducted. Ternary Mo-Si-N coatings were deposited on AISI D2 steel substrates by a hybrid method, where AIP technique was combined with a magnetron sputtering technique. Instrumental analyses of XRD, HRTEM, and XPS revealed that the Mo-Si-N coatings must be a composite consisting of fine $Mo_2N$ crystallites and amorphous $Si_3N_4$. The hardness value of Mo-Si-N coatings significantly increased from 22 GPa of $Mo_2N$ coatings to about 37 GPa with Si content of 10 at.% due to the refinement of $Mo_2N$ crystallites and the composite microstructure characteristics. The average friction coefficient of the Mo-Si-N coatings gradually decreased from 0.65 to 0.4 with increasing Si content up to 15 at.%. The effects of Si content on microstructure and mechanical properties of Mo-N coatings were systematically investigated.
Keywords
Mo-Si-N; Hybrid coating system; Microstructure; Mechanical properties;
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1 S. F. Murray, S. J. Calabrese, Lubr. Eng., 49 (1992) 955
2 I.- W. Lyo, H.-S. Ahn, D.-S. Lim, Surf. Coat. Technol., 163-164 (2003) 413   DOI
3 M. Urgen, O. L. Erylmaz, A. F. Cakir, E.S. Kayali, B. Nilufer, Y. lsik, Surf. Coat. Technol., 94-95 (1997) 501   DOI   ScienceOn
4 J. Suna, J. Musil, P. Dohnal, Vacuum, in press
5 S. R. Choi, I.-W. Park, S. H. Kim, K. H. Kim, Thin Solid Films, 447-448 (2004) 371   DOI
6 S. R. Choi, I.-W. Park, J. H. Park, K. H. Kim, Surf. Coat. Technol., 179 (2004) 89   DOI   ScienceOn
7 JCPDS, X-ray Index Cards, 25-1366
8 J. F. Mouleder, W. F. Stickle, P. E. Sobol, K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics, Inc., Minnesota, (1995)
9 M. Diserens, J. Patscheider, F. Levy, Surf. Coat. Technol., 108-109 (1998) 241   DOI
10 S. Veprek, Thin Solid Films, 317 (1998) 449   DOI
11 M. P. Delplancke-Ogletree, O. R. Monteiro, Surf. Coat. Technol., 108-109 (1998) 484   DOI
12 S. Wilson, A. T. Alpas, Wear, 245 (2000) 223   DOI
13 M. K. kazmanli, M. Urgen, A. F. Cakir, Surf. Coat. Technol., 167 (2003) 77   DOI   ScienceOn
14 T. Suszko, W. Gulbinnski, J. Jagielski, Surf. Coat. Technol., 194 (2005) 319   DOI
15 Y. Wang. R. Y. Lin, Mat. Sci. Eng., B 112 (2004) 42
16 J. H. Park, W. S. Chung, Y.-R. Cho, K. H. Kim, Surf. Coat. Technol., 188-189 (2004) 425   DOI
17 J.-P. Hirvonen, I. Suni, H. Kattelus, R. Lappalainen, P. Torri, H. Kung, T. R. Jervis, M. Nastasi, Mat. Res. Soc. Symp. Proc., 322 (1994) 279
18 S. Veprek, A. Niederhofer, K. Moto, T. Bolom, H.-D. Mannling, P. Nesladek, G. Dollinger, A. Bergmaier, Surf. Coat. Technol., 133-134 (2000) 152   DOI
19 J. Valli, U. Makela, H. T. G. Hentzell, J. Vac. Sci. Technol., A 4 (6) (1986) 2850
20 P. J. Martin, A. Bendavid, J. M. Cairney, M. Hoffman, Surf. Coat. Technol., 200 (2005) 2228   DOI   ScienceOn
21 M. Maoujoud, L. Binst, P. Delcambe, M. Offergeld-Jardinier, F. Bouillon, Surf. Coat. Technol., 52 (1992) 179   DOI   ScienceOn
22 I.-W. Park, S. R. Choi, J. H. Suh, C.-G. Park, K. H. Kim, Thin Solid Films, 447-448 (2004) 443   DOI
23 Q. Liu, T. Liu, Q. F. Fang, F. J. Liang, J. X. Wang, Thin Solid Films, in press
24 P. J. Rudnik, M. E. Graham, W. D. Sproul, Surf. Coat. Technol., 49 (1991) 293   DOI
25 J. Takadoum, H. Houmid-Bennani, D. Mairey, J. Eur. Ceram. Soc., 18 (1998) 553   DOI   ScienceOn
26 J.-P. Hirvonen, I. Suni, H. Kattelus, R. Lappalainen, P. Torri, H. Kung, T. R. Jervis, M. Nastasi, J. R. Tesmer, Surf. Coat. Technol., 74-75 (1995) 981   DOI
27 S. Veprek, S. Reiprich, Thin Solid Films, 268 (1995) 64   DOI
28 J. B. Choi, K. Cho, M.-H. Lee, K. H. Kim, Thin Solid Films, 447-448 (2004) 365   DOI