Browse > Article

Nanolithography Using Haptic Interface in a Nanoscale Virtual Surface  

Kim Sung-Gaun (Div. of Mechanical and Automotive Engineering, Kongju National University)
Publication Information
Journal of the Korean institute of surface engineering / v.39, no.2, 2006 , pp. 64-69 More about this Journal
Abstract
Nanoscale task such as nanolithography and nanoindenting is a challenging work that is beyond the capabilities of human sensing and precision. Since surface forces and intermolecular forces dominate over gravitational and other more intuitive forces of the macro world at the nanoscale, a user is not familiar with these novel nanoforce effects. In order to overcome this scaling barrier, haptic interfaces that consist of visual and force feedback at the macro world have been used with an Atomic Force Microscope (AFM) as a manipulator at the nanoscale. In this paper, a nanoscale virtual coupling (NSVC) concept is introduced and the relationship between performance and impedance scaling factors of velocity (or position) and force are explicitly represented. Experiments have been performed for nanoindenting and nanolithography with different materials in the nanoscale virtual surface. The interaction forces (non contact and contact nanoforces) between the AFM tip and the nano sample are transmitted to the operator through the haptic interface.
Keywords
Haptic interfaces; Nonorobotics; Nonolithogrophy; Teleoperation control; Nonotechnology;
Citations & Related Records
연도 인용수 순위
  • Reference
1 G. Li, N. Xi, M.Yu, F. Salem, D. Wang, J. Li, Manipulation of Living Cells by Atomic Force Microscopy, in Proc. of the IEEE/ ASME Int. Conf. on Advanced Intelligent Mechatronics, (2003) 862-867
2 J. E. Colgate, IEEE Trans. on Robotics and Automation, 9(4) (1993) 374   DOI   ScienceOn
3 D. Y. Hwang, Blake Hannaford, H. R. Choi, KSME Journal, 15(1) (2001)
4 S. E. Salcudean et al., IEEE Control Systems Magazine, 19(6) (1999) 29   DOI
5 W. Vogl, M. Sitti, M. Ehrenstrasser, M. F. Zah, Augmented Reality User Interface for Nanomanipulation using Atomic Force Microscopes, in Proc. of the EuroHaptics 2004, Technische Universitaet in Munich, Germany (2004)
6 G. Li, N. Xi, M. Yu, W.-K. Fung, IEEE/ASME Trans. on Mechatronics, 9(2) (2004) 358
7 N. Hogan, Controlling Impedance at the Man/Machine Interface, in Proc. of the IEEE Int. Conf. Robotics and Automation, Vol. 3, Scottsdale, AZ, IEEE CS Press, (1989) 1626-1631
8 B. E. Miller, J. E. Colgate, R. A. Freeman, IEEE Trans. on Robotics and Automation, 16(6) (2000) 712   DOI   ScienceOn
9 M. Falvo et al., The nanoManipulator: A teleoperator for manipulating materials at the nanometer scale, in Proc. of the Int. Symp. Science and Technology of Atomically Engineered Materials, Richmond, VA, (1995) 579-586
10 R. J. Adams, B. Hannaford, IEEE Trans. on Robotics and Automation, 15(3) (1999) 465   DOI   ScienceOn
11 M. Goldfarb, Dimensional analysis and selective distortion in scaled bilateral telemanipulation, in Proc. of the IEEE Int. Conf. Robotics and Automation (ICRA 98), Leuven, Belgium, (1998) 1609-1641
12 M. Sitti, H. Hashimoto, IEEE/ASME Trans. on Mechatronics, 8(2) (2003) 287   DOI   ScienceOn
13 G. Whitesides, E. Ostuni, S. Takayama, X. Jiang, D. Ingber, Annual Review of Biomedical Engineering, 3 (2001) 335   DOI   ScienceOn
14 M. C. Cavusoglu, A. Sherman, F. Tendick, IEEE Trans. on Robotics and Automation, 18(4) (2002) 641   DOI   ScienceOn
15 J. E. Colgate, J. Brown, Factors Affecting the Width of a Haptic Display, in Proc. of the IEEE Int. Conf. Robotics and Automation (ICRA 94), IEEE CS Press, (1994) 3205-3210
16 A. S. Nain, D. H. Goldman, M. Sitti, Three-dimensional nanoscale manipulation and manufacturing using proximal probes: controlled pulling of polymer micro/nanofibers, in Proc. of the IEEE Int. Conf. Robotics and Automation (ICRA 04), 1 (2004) 434-439
17 M. Guthold et al., IEEE/ASME Trans. on Mechatronics, 5(2) (2000) 189   DOI   ScienceOn
18 W. Vogl, Telepresence at the Nano Scale: Augmented Reality Interface for Scanning Probe Microscopes, Tech. Univ. of Munich, MSc Diploma Thesis, (2003)