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Structure and Mechanical Characteristics of ZrCrAIN Nanocomposite Thin Films by CFUBMS  

Kim Youn J. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology)
Lee Ho Y. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology)
Shin Kyung S. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology)
Jung Woo S. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology)
Han Jeon G. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology)
Publication Information
Journal of the Korean institute of surface engineering / v.38, no.5, 2005 , pp. 183-187 More about this Journal
Abstract
The quaternary ZrCrAIN nanocomposite thin films are synthesized by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS). Microstructure and mechanical properties of ZrCrAIN nanocomposite thin films are studied. Grain refinement of ZrCrAIN nanocomposite thin film is occurred by controlling $N_{2}$ partial pressure. Maximum hardness value according to the various $N_{2}$ partial pressures is obtained at 45 GPa. It is also conformed that critical value of the grain size (d) needs to achieve the maximum hardness.
Keywords
ZrCrAIN; Nanocomposite; CFUBMS;
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