Browse > Article

A Real-Time Diagnostic Study of MgO Thin Film Deposition Process by ICP Magnetron Sputtering Method  

Joo Junghoon (Kunsan National University, Department of Materials Science & Engineering)
Publication Information
Journal of the Korean institute of surface engineering / v.38, no.2, 2005 , pp. 73-78 More about this Journal
Abstract
A real-time monitoring of ICP(inductively coupled plasma) assisted magnetron sputtering of MgO was carried out using a QMS(quadrupole mass spectrometer), an OES(optical emission spectrometer), and a digital oscilloscope with a high voltage probe and a current monitor. At the time of ICP ignition, the most distinct impurity was OH emission (308.9 nm) which was dissociated from water molecules. For reactive deposition oxygen was added to Ar and the OH emission intensity was reduced abruptly When the discharge voltage was regulated by a PID controller from 240V(metallic mode) to 120V(oxide mode), the emission intensity from Mg (285.2 nm) changed proportionally to the discharge voltage, but the intensity of Ar I(811.6 nm) was constant. At 100V of discharge voltage, Mg sputtering was almost stopped. Emissions from Ar I(420.1 nm) and Mg I were dropped down to 1/10, but Ar I(811.6 nm) didn't change. And the emission from atomic oxygen (O I, 777.3 nm) was increased to 10 times. These results are compatible with those from QMS study.
Keywords
Plasma display panel; MgO; Inductively coupled plasma; Sputtering;
Citations & Related Records
연도 인용수 순위
  • Reference
1 R. F. Bunshah, Handbook of Deposition Technologies for Films and Coatings, NoYes Pub., NewJersey, (1994) 261
2 M. Dickson, J. Hopwood, J. Vac. Sci. Technol A, 15 (1997) 2307   DOI   ScienceOn
3 Ed. David R. Lide, Handbook of Chemistry and Physics, 76th Ed., 10-1 (1996) 10
4 Y. Matsuda, Y. Koyama, M. Iwaya, M. Shinohara, H. Fujiyama, Thin Solid Films, 475 (2005) 113   DOI   ScienceOn
5 김선호, 주정훈, 한국표면공학회지, 37(3) (2004) 169
6 R. W. B. Pearse, A. G. Gaydon, The Identification of Molecular Spectra, 4th Ed. Chapman and Hall, (1976)
7 S. H. Seo, C. W. Chung, H. Y. Chang, Surf. Coat. Technol., 131 (2000) 1   DOI   ScienceOn