Browse > Article

Influence of Deposition Pressure on Optical and Electrical Properties of ITO/Al/ITO Thin Films on PET by RF Magnetron Sputtering  

Seo Jung-Eun (Korea University of Technology and Education, Advanced Materials Engineerin)
Kim Sang-Ho (Korea University of Technology and Education, Advanced Materials Engineerin)
Lee In-Seon (Korea University of Technology and Education, Advanced Materials Engineerin)
Kim Dong-Won (Kyonggi University)
Publication Information
Journal of the Korean institute of surface engineering / v.38, no.2, 2005 , pp. 69-72 More about this Journal
Abstract
ITO-Al-ITO multi-layers were deposited at room temperature by RF magnetron sputtering on polyethylene terephthalate (PET). The films were deposited at various pressures of $8\times10^{-4},\;1\times10^{-3},\;4\times10^{-3},\;8\times10^{-3}\;and\;1\times10^{-2}$ Torr. A correlation between microstructure and electro-optical properties was studied. Films deposited? at low pressure have higher transmission, and lower reflectance and resistance than film deposited at high pressure. Sheet resistance, transmission, and reflectance were $141.6\Omega/\Box\;88\%\;and\;6.8\%$ resectively when the deposition pressure was $8\times10^{-4}$ torr, that was the optimum condition.
Keywords
ITO; Al; PET; RF magnetron sputtering; Optical transmission; Sheet resistance;
Citations & Related Records
연도 인용수 순위
  • Reference
1 L. R. Cruza, C. Legnania, I. G. Matosoa, C. L. Ferreiraa, H. R. Moutinho, Materials Research Bulletin, 39 (2004) 993   DOI   ScienceOn
2 L.-J. Meng, M. P. Dos Santos, Thin Solid Films, 303 (1997) 151   DOI   ScienceOn
3 Y.-S. Kim, Y.-C. Park, S. G. Ansari, J.-Y. Lee, B.-S. Lee, H.-S. Shin, Surface and Coatings Technology, 173 (2003) 299   DOI   ScienceOn