Lamellar Structured TaN Thin Films by UHV UBM Sputtering
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Lee G. R.
(Materials Science and Engineering Department, Seoul National University)
Shin C. S. (Materials Science and Engineering Department, University of illinois at Urbana-Champaign) Petrov I. (Materials Science and Engineering Department, University of illinois at Urbana-Champaign) Greene J, E. (Materials Science and Engineering Department, University of illinois at Urbana-Champaign) Lee J. J. (Materials Science and Engineering Department, Seoul National University) |
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