Characterization of Nanocomposite Ti-Si-N Films Prepared by a Hybrid Deposition System of A If and Sputtering Techniques |
윤순영
(부산대학교 공과대학 재료공학부)
최성룡 (부산대학교 공과대학 재료공학부) 이미혜 (기술신용보증기금 기술평가센터) 김광호 (부산대학교 공과대학 재료공학부) |
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