Synthesis and Mechanical Properties of nc-TiN/a-SiN Nanocomposite Coating Layer |
김광호
(부산대학교 재료공학부)
윤석영 (부산대학교 재료공학부) 김수현 (부산대학교 재료공학부) 이건환 (한국기계연구원 표면기술연구부) |
1 | S. Veprek and S. Reiprich : Thin Solid Films268 (1995) 64 DOI ScienceOn |
2 | T. Cselle and A. Barimani : Surf. Coat. Te-chnol., 76-77 (1995)712 DOI |
3 | O. Knotec, M. Bhmer and T. Leyendecker : J Vac.Sci.Technol.,A4(6) (1986) 2695 |
4 | F. Vaz, L. M. Rebouta, S. Ramos, M. F. da Silvaand J. C. Soares : Surf. Coat. Technol., 108-109 (1998) 236 DOI ScienceOn |
5 | E. V. Shalaeva, S. V. Bohsov, O. F. Denisov, M.V. Kuznetsov : Thin Solid Films., 339 (1999)129 DOI ScienceOn |
6 | S. Veprek, S. Reiprich and L. Shizhi : Appl.Phys. Lett., 66 (20) (1995)2640 DOI ScienceOn |
7 | M. Diserens, J. Patscheider and F. Lvy : Surf Coat.Technol, 108-109 (1998) 241 DOI ScienceOn |
8 | M. Diserens, J. Patscheider and F. Lvy : Surf. Goat.Technol.,120-121 (1999) 158 |
9 | J. F. Moulder, W. F. Stickle, P. E. Sobol and KD.Bomben : Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics Inc., Minnesota, (1995) 238,240 |
10 | S.Veprek : Surf. Coat. Technol., 97 (1997) 15 DOI ScienceOn |
11 | H. Ichimura and A. Kawana : J. Mater. Res., 8(1993) 1093 DOI ScienceOn |
12 | J.-W. He, D.-D. Bai, K.-W. Xe and N.-S. Hu :Surf. Coat. Technol, 74-75 (1995) 387 DOI ScienceOn |
13 | S. Wilson and A, T. Alpas : Wear., 245 (2000)223 DOI ScienceOn |
14 | L. Shizhi, S. Yulong and P. Hongrui : PlasmaChem. Plasma Process, 12 (3) (1992) 287 DOI |
15 | W. D. M nz : J. Vac. Sci. Technol, A 4(6)(1986) 2717 DOI |
16 | J. Takadoum, H. Houmid-Bennani and D. Mai-rey : J. Eur. Ceram. Soc., 18 (1998) 553 DOI ScienceOn |