Nucleation and growth mechanism of nitride films deposited on glass by unbalanced magnetron sputtering
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정민재
(성균관대학교 금속재료공학부 플라즈마응용표면기술연구센터)
남경훈 (성균관대학교 금속재료공학부 플라즈마응용표면기술연구센터) 한전건 (성균관대학교 금속재료공학부 플라즈마응용표면기술연구센터) |
1 | Jae Hyoung Choi, Jeong Yong Lee, Jin Hyeok Kim, Thin Solid Film 384 (2001) 166 DOI ScienceOn |
2 | 2L. Hultman, Vacuum 57 (2000) 1 DOI ScienceOn |
3 | T. Kautzsch, A Braun, H.-G. Wagemann, Mater Sci.Eng.B73 (2000) 208 |
4 | C. Gautier, J. Machet, Thin Solide Films 295 (1997) 43 DOI ScienceOn |
5 | T. Kautzsch, A Braun, H.-G. Wagemann, Mater. Sci. Eng.B73 (2000) 208 |
6 | E. Lugscheider, C. Barimani, C. Wolff, S. Guerreiro, G. Doepper, Surface and Coating Technology 86-87(1996)177 |
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